Whether you need a single chamber rebuilt or a full tool relocated across borders, we handle the same workflow end-to-end — assess, refurbish, relocate, qualify.
Most of our work falls into one of the eight service types below. Whether you need a single chamber rebuilt or a full tool relocated across borders, we handle the same workflow end-to-end — assess, refurbish, relocate, qualify.
Full disassembly, parts replacement, sub-system rebuild and bench-level qualification — restoring tools to manufacturer-spec performance.
Tool de-installation, crating, customs handling, on-site re-installation and utility hook-up — coordinated with your facilities team.
Hardware and software updates that adapt legacy tools to new wafer sizes, processes, or fab requirements without replacing the platform.
Fault diagnosis and component-level repair across XY stage, illumination optics, throttle valves, RF systems and process chambers.
Periodic deep maintenance — typically scheduled at 5- and 10-year intervals — to extend tool life and restore process margins.
Auto-drain systems, manual coater, chemical mixing, hot-plate modules, LED coater/developer and Mark-Vz load/unload align units.
Cost-effective alternative-source parts validated against OEM specifications — significant savings without sacrificing yield.
AMAT Endura/Centura chamber rebuilds — Ti/TiN, AL PVD, MO-CVD, DPS+ Metal, E-Max, Mxp+ — assembled, leak-checked, qualified.
Every model below has been hands-on serviced by our team. If a system you run isn't on this list, we may still be able to help — call us and we'll tell you straight.