Browse parts lists published by our team — most posts include downloadable PDFs with part numbers, models supported and quote forms.
| P/N | DESCRIPTION | QTY | CONDITION |
| 718-094756-081 | 1 | oem new | |
| 715-011912-083 | plate baffle upper | 2 | oem new |
| 715-28554-002 | ESC plate | 1 | oem used |
| 715-011531-009 | Electrode Al , Anodized | 1 | oem new |
| upper Ceramic Ring | 1 | oem used | |
| 131357600 | Top Plate 8 inch | 1 | oem new |
| 716-330191-082 | Focus Ring 8" ESC | 1 | oem new |
| 716-028240-066 | Focus Ring 8" ESC | 1 | oem new |
| 716-330504-081 | Focus Ring 8" | 1 | oem new |
| 853-017634-101 | Solenoid Release | 2 | oem new |
| 660-091820-001 | 24V power Supply | 1 | oem used |
| 853-012230-002 | Gate inner | 1 | oem new |
| 853-441119-002 | optical end point detector | 1 | oem new |
| 853-330282-600 | RF sensor low Match | 1 | oem new |