| NO | Maker | P/N | Description | Equip Model |
| 1 | Nikon | 4S017-841 |
(KBB05650-AE01) PC8 AIRDRV PRESSURE CONTROL Nikon MPX(BOB Electronics) |
NSR-2205i11D |
| 2 | Nikon | Nikon 5" Reticle Case | NSR-2205i11D | |
| 3 | Nikon | Wafer Chuck (8"body for 6") | NSR-2205i11D | |
| 4 | Nikon | Sony XC-77 CCD Camera Module ( DC 10.5-15V , 2.2W ) | NSR-2205i11D | |
| 5 | Nikon | 4B001-346AN | Hammer Unit | NSR-2205i11D |
| 6 | Nikon | ST32430N | Vax Hdd( DKA300, DKA200 ) | NSR-2205i11D |
| 7 | Nikon | KBA0020-A1Y | Ball Screw | NSR-2205i11D |
| 8 | Nikon | Reference Mark | NSR-2205i11D | |
| 9 | Nikon | FETCH ARM 8Inch.(6inch compatible, i11D) | NSR-2205i11D | |
| 10 | Nikon | Vaxstation 4000 /96 | NSR-2205i11D | |
| 11 | Nikon | SIDE SLIDE ARM(小), SIDE SLIDE ARM(大) | NSR-2205i11D | |
| 12 | Nikon | Power Supply | NSR-2205i11D | |
| 13 | Nikon | Irradiance meter | ||
| 14 | Nikon | R2205HMF Ver 3.09 (i11d) | ||
| 15 | Nikon | R2205HC Ver 6.09 (i11d) | ||