
| No | P/N | Description | Remark |
| 1 | GLL-130088 | UNIVERSAL CONTROLLER | |
| 2 | 23021-653 | TEST ADAPTER CARD | |
| 3 | 1140-01312 | SMIF DC POWER SUPPLY BD | |
| 4 | 0730-01025 | Seris 344 ion gauge Controller | |
| 5 | 0660-01619 | CONTROL PHASE ANGLE 120VAC | |
| 6 | 0660-01548 | Ion Gauge Module PCB | |
| 7 | 0190-70103 | MONITOR LIGHT PEN INTERCONNECT BD | |
| 8 | 0190-36715 | VDS2 COM GP IO DIST BD |