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All 기본Nikon stepper
SBC V440
AMAT Part No : 0020-01068 , Filer 650mm Orienter Laser
TEL A31035C550 , EPD Monitor Board
AMAT Part No : 0090-00768 , LOADLOCK BRAKE INDEXER ASSEMBLY
TEL 881-521480-5
TEL 1881-022003-1D , OPERATOR I/F BOARD
TEL DSB-86/36A (9139)
TEL 881-62060-3 , tSBC-ACRTC
TEL 881-520480-5
TEL 1881-022001-18 , System I/O 2
TEL 881-520470-7,
NEC FC-9801F Model1 ,
TEL Part No : 881-520470-7 ,
NEC PC-9801ES
DaView-500MX(MB945) , AC220V 60Hz Power
AMAT Part No : 0190-70102 , VGA VIDEO CONTROLLER BD
AMAT Part No : 0100-00793 , VGA Video Controller PCB Card
AMAT Part No : 0100-20173 , STEPPER CONTROLLER BD ASSY
AMAT Part No : 0190-76005 , OMS BD
AMAT Part No : 0200-00261 , CHAMBER INSERT 200MM TXZ CIP
AMAT Part No : 0010-12860 , HEATER LIFT ASSY , DXZ
AMAT Part No : 0040-00876 / 0040-05592 , E-Max 200mm ESC Chuck EMXP+ Dual Zone
AMAT Part No : 0040-45164 / 0040-45205 , ESC ASSY 200MM FLAT
AMAT Part No : 0020-19003 , INSERT , SLIT VALVE SHO
AMAT Part No : 0040-45164 / 0040-45206 , ESC ASSY 200MM FLAT
AMAT Part No : 0190-09227 , PLASMA APPLICATOR, PRSP
AMAT Part No : 0190-09275 , WAVEGUIDE, E-BEND,LOWER ASP
AMAT Part No : 0190-09246 , wMICROWAVE TUNER,3-STUB,MANUAL,ASP
AMAT Part No : 0190-76048 , PWR SUP, RF 1250W 13.56MHZ 200/208VAC
AMAT Part No : 0015-09091 , PHASE ANGLE CON
AMAT Part No : 0190-70060 , wMAGNET DRIVE ASSY ( Sierracin Magnedyne 1100-0051-00 Magnet Driver )
AMAT Part No : 0010-10980 , ASSY, TOP LID, RPS
AMAT Part No : 0970-01002 , ISOL WATER COOLER RPS
AMAT Part No : 3870-01000 , VALVE ASSY THROTTLE MxP + 200MM, GEAR TYP
AMAT Part No : 0200-36105 , CHAMBER INSERT 200MM TXZ CIP
AMAT Part No : 0020-32318 , GAS DISTR PLATE, 37 HOLES, OXALIC, 5-7 MIL, EGEC
AMAT Part No : 0040-04221 , CHAMBER MISC (LID, LEXAN, SLIT LINER DOOR)
AMAT Part No : 0020-32036 , PLATE BLOCKER 100 SX, UNIVERSAL CHAMBER
AMAT Part No : 0020-20223 , PLATE, GAS DISTRIBUT , 2-12150000-18 REV:G-
AMAT Part No : 0010-01442 , Microwave Endpoint Detector
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