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Canon stepper spare parts
| Part No | Description |
| 5915PC-22t-B30 | FAN |
| BD2-4835-130 | SPACER,ADJUSTING(T=13) SUS |
| BD2-4835-150 | SPACER,ADJUSTING(T=15) SUS |
| BE1-8572 | HOLDER,RING 1 |
| BE1-8573 | HOLDER,RING 2 |
| BE1-8574 | HOLDER,RING 3 |
| BE1-9616 | SPACER |
| BF6-3046 | SCH ( Hand 1 ) Robot Arm |
| BG0-7754 | 2ND CONDENSER LENS UNIT,(B) |
| BG0-7755 | 2ND CONDENSER LENS UNIT,(C) |
| BG0-7896 | 2ND CONDENSER LENS (BC TYPE) |
| BG3-1407 | IMAGE PROCESSOR PCB ASS'Y |
| BG3-2090 | M-POS 3 PCB |
| BG3-2525 | IMAGE SHIFTER2 |
| BG3-2794 | IL5-C/D PCB ASS'Y |
| BG3-2851 | MOTOR UNIT,DC 10-37.5W |
| BG3-3014 | M-POS 5 PCB |
| BG3-3048 | ECI-CD5 PCB ASS'Y |
| BG3-3118 | HEAD AMP PCB ASS'Y |
| BG3-3336 | EXP CD2 PCB ASS'Y |
| BG3-4356 | Reticle Turn Table Reticle detection sensor |
| BG3-5132 | LB-SUB PCB ASS'Y |
| BG3-5179 | ACCELERATION SENSOR UNIT (B) |
| BG3-5218 | OAS-AF SENSOR PCB ASS'Y |
| BG3-6644 | URS-CD (EX6) PCB ASS'Y |
| BG3-6716 | MEASUREMENT BOARD ASS'Y (X,YQ) |
| BG3-6730 | DAMPER CD P6 PCB ASS'Y |
| BG4-2014 | Scope CAMERA |
| BG4-2035 | IPIF-3 PCB ASS'Y |
| BG4-2766 | 5CH OPAF ASS'Y W/IC PCB |
| BG4-2770 | Linear Motor Power Module |
| BG4-2846 | OAS AF SENSOR AMP PCB ASS'Y |
| BG4-2875 | PA PCB ASS'Y W/IC |
| BG4-3505 | SH PCB ASS'Y, W/IC |
| BG4-4378 | EXPOSE SHUTTER UNIT |
| BG4-4648 | XY STAGE CHECK PCB ASS'Y W/IC |
| BG4-4907 | XY PRE-AMP(X) PCB ASS'Y W/IC |
| BG4-4908 | XY PRE-AMP(Y) PCB ASS'Y W/IC |
| BG4-5039 | PA CCD Unit / Ori R Type 6Inch |
| BG4-5039 | PA CCD Unit / Ori L Type 6Inch |
| BG4-5039 | PA CCD Unit / Ori R Type 4~6nch |
| BG4-5039 | PA CCD Unit ( 8 Inch Ori L Type ) |
| BG4-5039 | PA CCD Unit ( 8 Inch Notch R Type ) |
| BG4-5421 | Piezo |
| BG4-5459 | PZ DRV PCB |
| BG4-6055 | Reticle Cassette Robot Arm |
| BG4-6456 | STAGE DSP PCB ASS'Y |
| BG4-6457 | XY STAGE PRE-AMP PCB ASS'Y |
| BG4-6459 | OFCD-IF PCB ASS'Y |
| BG4-6460 | PZ ANA PCB |
| BG4-6463 | Stage Piping Box ( With PCB ) |
| BG4-6465 | MEASUREMENT PCB (X) ASS'Y |
| BG4-6465 | MB PCB ( ZMI 1000A ) |
| BG4-6466 | MEASUREMENT PCB (Y) ASS'Y(ZMI 1000A) |
| BG4-6466 | MEASUREMENT PCB (Y) ASS'Y(8020) |
| BG4-6467 | MEASUREMENT PCB (THETA) ASS'Y |
| BG4-6467 | MB PCB (THETA) ASS'Y ( ZMI 1000A ) |
| BG4-6572 | FLAT CABLE (Y2) |
| BG4-6579 | MV CD PCB ASS'Y |
| BG4-6583 | HRD SENSOR PCB ASS'Y |
| BG4-6590 | P-MOUNT CD PCB ASS'Y |
| BG4-6602 | Linear Motor Power Module(SET) |
| BG4-6603 | CCD OPTF CAP(2) PCB ASS'Y |
| BG4-6604 | PULSE MOTOR UNIT,DC 10W UNDER |
| BG4-6619 | SNS PCB ASS'Y |
| BG4-6626 | i4 Main CPU PCB |
| BG4-6628 | CAM UNIT(PCB ASS'Y) |
| BG4-6629 | XY STAGE CPU PCB ASS'Y |
| BG4-6631 | CD I/F PCB ASS'Y |
| BG4-6632 | TV IMAGE CPU PCB ASS'Y |
| BG4-6633 | TV Back Palnel |
| BG4-6690 | 1ST CONDENSER LENS UNIT(MAIN) |
| BG4-6692 | 2ND COND,ZOOM LENS UNIT (I4) |
| BG4-6697 | MERCURY LAMP, 2KW |
| BG4-6698 | Lamp Starter ( 2KW ) |
| BG4-6704 | IL1 C/D PCB ASS'Y |
| BG4-6705 | IL2 C/D PCB ASS'Y |
| BG4-6724 | RETICLE ROBOT CONTROLLER UNIT |
| BG4-6735 | RETICLE ROBOT UNIT (Need Overhaul) |
| BG4-6737 | HAND UNIT,R/C CASSETTE |
| BG4-6745 | R/C CPU PCB ASS'Y |
| BG4-6746 | RC/WF IF PCB |
| BG4-6755 | SH PCB ASS'Y |
| BG4-6789 | LD/PD PCB |
| BG4-6794 | WF SCH/EL PCB ASS'Y |
| BG4-6811 | PA/SH PCB |
| BG4-6811 | WF PA/SH PCB ASS'Y |
| BG4-6823 | WF CPU PCB |
| BG4-6867 | CD80-CD PCB ASS'Y |
| BG4-6902 | ASCD(L) PCB ASS'Y |
| BG4-6903 | ASCD(R) PCB ASS'Y |
| BG4-6928 | URS CD PCB ASS'Y |
| BG4-6934 | OPTF CCD Cable |
| BG4-6935 | OPTF CCD Cable |
| BG4-6936 | OPTF CCD Cable |
| BG4-6937 | OPTF CCD Cable |
| BG4-6938 | OPTF CCD Cable |
| BG4-6973 | AC/DC Power Supply ( D-Rack ) |
| BG4-6974 | E-CD PCB ASS'Y |
| BG4-7001 | RS-232C SWITCHING PCB ASS'Y |
| BG4-7082 | Lamp Power Supply |
| BG4-7089 | Motor |
| BG4-7093 | Motor |
| BG4-7648 | 1ST CONDENSER LENS UNIT |
| BG4-7653 | IL2(W) CD PCB A'SSY |
| BG4-7847 | CABLE ASS'Y,RCRO-2 (reticle liberary) |
| BG4-7874 | 2ND CONDENSER LENS UNIT (A) |
| BG4-7937 | CAP2 PCB |
| BG4-7938 | HROA CD2(W) PCB A'SSY |
| BG4-8182 | CD80-CD2 PCB ASS'Y |
| BG4-8192 | INTERMEDIATE LIBRARY CONTROL |
| BG4-8193 | LIBRARY ELEVATOR CONTROL PCB |
| BG4-8224 | M-POS PCB |
| BG4-8516 | LED UNIT (R) |
| BG4-8517 | LED UNIT (L) |
| BG4-8539 | IL1-CD PCB ASS'Y |
| BG4-8546 | IL3-CD PCB ASS'Y |
| BG4-8620 | ACCELERATION SENSOR UNIT (V) |
| BG4-8621 | ACCELERATION SENSOR UNIT (H) |
| BG4-8632 | Wafer Chuck (6", ORI, Ring ) |
| BG4-8632 | Wafer Chuck (8", ORI, Pin ) |
| BG4-8632 | Wafer Chuck (8", Notch, Ring ) |
| BG4-8632 | Wafer Chuck (6", ORI, Pin ) Japan |
| BG4-8700 | |
| BG4-8705 | MV-CD PCB ASS'Y |
| BG4-8789 | |
| BG4-8835 | URS-CD(EX) PCB ASS'Y |
| BG4-8866 | ILLUMINATION PRE AMP Unit |
| BG4-8980 | XY-Stage 교환 리뿔 |
| BG4-9153 | HEAD AMP PCB ASS'Y |
| BG4-9154 | STAGE DIST.PCB ASS'Y (X) |
| BG4-9159 | STAGE DIST.PCB ASS'Y (B) |
| BG4-9175 | MLE IF PCB ASS'Y |
| BG4-9191 | STAGE PRE-AMP PCB ASS'Y (2) |
| BG4-9195 | STAGE DIST.PCB ASS'Y (Y2X) |
| BG4-9218 | MLE-INTERMEDIATE PCB ASS'Y |
| BG4-9250 | IL2W CD PCB ASS'Y |
| BG4-9297 | CURRENT AMP PCB ASS'Y (XY) |
| BG4-9300 | CURRENT AMP PCB ASS'Y (FZ) |
| BG4-9332 | DAMPER CD2 PCB ASS'Y |
| BG4-9369 | COAXIAL CABLE UNIT |
| BG4-9745 | OFCD-IF(2) PCB ASS'Y |
| BG5-2114 | Exposure Shutter |
| BG5-5403 | MASKING BLADE (Old type) |
| BG6-1212 | PCB ASS'Y,SC IF AS-2 |
| BG6-1256 | PCB ASS'Y,PM DRV/AS |
| BG6-1291 | PCB ASS'Y,DST 1-9/SA-1 |
| BG6-4201 | Cable |
| BG9-1084 | IL MASK DRIVING PCB ASS'Y |
| BG9-2155 | 4CH. PRE AMP PCB ASS'Y |
| BG9-2269 | LED UNIT |
| BG9-3346 | SENSOR 1 PCB ASS'Y W/IC |
| BG9-3500 | ADP 2 PCB |
| BG9-3501 | IMP2 PCB |
| BG9-3502 | ACC1 PCB |
| BG9-3632 | LED UNIT (880NM) |
| BG9-3718 | XY STAGE I/F PCB |
| BG9-3727 | XY STAGE CPU PCB ASS'Y W/IC |
| BG9-3769 | PIEZO DRIVE PCB ASS'Y W/IC |
| BG9-3779 | PIEZO (A) PROCESSOR PCB ASS'Y |
| BG9-4084 | ACC-I (1) PCB ASS'Y W/IC |
| BG9-4152 | PCB Extenstion |
| BG9-4658 | OPTF LED BOX |
| BH2-0661 | MOTOR, AC 15W |
| BH2-0802 | VALVE,REGULATOR |
| BH2-1080 | Magnetic Velve |
| BH2-1218 | MAGNETIC VALVE |
| BH2-1224 | MAGNETIC VALVE |
| BH2-9113 | PA Module |
| BH2-9114 | Reticle Library Drive PCB |
| BH3-0801 | MICRO SWITCH |
| BH5-3277 | POWER SUPPLY, F/LASER |
| BH5-3500 | DC POWER SUPPLY (PPC) |
| BH5-6240 | DISPLACEMENT GAUGE (With Sensor Cable) |
| BH5-6240 | DISPLACEMENT GAUGE (Piezo Amp Unit ) |
| BH5-6258 | ATMOSPHERIC TRANSDUCER(기압계) |
| BH5-7841 | PCB Extenstion |
| BH5-7842 | PCB Extenstion |
| BH5-7843 | PCB Extenstion |
| BH5-7844 | PCB Extenstion |
| BH9-0177 | SCSI EXTENDER PCB ASS'Y |
| BN9-2615 | GLASS PLATE SET |
| BN9-2615-101-202 | GLASS PLATE |
| BN9-2615-101-203 | GLASS PLATE |
| BN9-2615-101-204 | GLASS PLATE |
| BN9-2615-101-205 | GLASS PLATE |
| BN9-2615-101-206 | GLASS PLATE |
| BN9-2615-101-237 | GLASS PLATE |
| BN9-2717 | GLASS BOARD/ 방진Glass |
| BN9-2737-000 | GLASS PLATE SET |
| BN9-2737-001 | ND FILTER (001) |
| BN9-2737-002 | ND FILTER (002) |
| BN9-2737-003 | ND FILTER (003) |
| BN9-2737-004 | ND FILTER (004) |
| BN9-2737-005 | ND FILTER (005) |
| BN9-3261-009 | FILTER,ND FOR ES2 |
| BN9-3261-015 | FILTER,ND FOR ES2 |
| BN9-3261-024 | FILTER,ND FOR ES2 |
| BN9-3261-037 | FILTER,ND FOR ES2 |
| BN9-3261-057 | FILTER,ND FOR ES2 |
| BN9-3261-088 | FILTER,ND FOR ES2 |
| BN9-3473 | FILTER,ND,SPF |
| BN9-3887 | FILTER,ND,SPF FOR I4 #705 |
| BN9-6168 | COLD MIRROR |
| BN9-6229-030 | SUB FILTER, I-LINE |
| BN9-7069 | GLASS PLATE |
| BN9-7069, BF6-2162 | GLASS PLATE ( 방진 Glass ) |
| BN9-7404 | CONVEX LENS |
| BN9-7405 | MIRROR |
| BN9-7406 | MIRROR (1st condensor Lens Upper) |
| BN9-7407 | TOWER MIRROR |
| BN9-7513 | I LINE FILTER UNIT |
| BN9-7989 | Glass for dust protection |
| BN9-8343 | IMAGE FIBER UNIT, GLASS(WEE Fiber) |
| BS2-3232 | HARMONIC DRIVE |
| BS2-4327 | PULLEY / Auto Feeder Robot Rail 축 Unit |
| BS6-2124 | HARMONIC DRIVE |
| BS7-2013 | AIR FILTER UNIT,PETRO SORBE |
| WG8-5051 | PHOTO-INTERRUPTER,TLP1201A |
| WG8-5304 | PHOTO SENSOR |
| WG9-5007 | AMP UNIT |
| WL1-5023 | MOTOR,STEPPING |
| WP8-5050 | XYZ Sensor and AMP Unit |
| XG3-8022-701 | Bearing |
| Y60-0794 | 1ST CONDENSER LENS UNIT D |
| Y60-0838 | CABLE UNIT |
| Y60-0840 | Cable |
| Y60-0850 | AA Shutter |
| Y60-0861 | Bar Mirror X, Y(i4,i5) |
| Y60-0862 | LENS UNIT,1ST CONDENSER LAMP-1 |
| Y60-0863 | LENS UNIT,1ST CONDENSER LAMP-2 |
| Y60-0863 | LENS UNIT,1ST CONDENSER LAMP-2 |
| Y60-0869 | LENS UNIT, IL (2nd Zoom 고정) |
| Y60-0877 | AA/FRA TAKE OUT UNIT |
| Y60-0908 | 2ND COND,ZOOM LENS UNIT (IW) |
| Y60-0909 | FLY'S EYE LENS UNIT |
| Y60-1010 | PLANE PARALLEL PLATE UNIT/Under Cover Glass |
| Y60-1010 | PLANE PARALLEL PLATE UNIT ( under cover ) |
| Y60-1034 | GLASS PLATE UNIT |
| Y60-1052 | GLASS COVER UNIT/Upper Cover Glass |
| Y60-1053 | GLASS COVER UNIT |
| Y60-1054 | 1ST CONDENSER LENS UNIT,LAMP-1 |
| Y60-1108 | Theta Z Tilt Unit |
| Y60-1221 | 2nd Condensor Lens (Japan) |
| Y60-1301 | LENS UNIT,3RD COND,W/LENS CAP |
| Y60-1301 | LENS UNIT,3RD COND,W/LENS CAP |
| Y60-1478 | WF Robot ( Hand 1 ) |
| Y60-1478 | SCH Robot ( Hand 1 ) |
| Y60-1479 | Reticle Robot |
| Y60-1480 | Reticle Cassette Robot |
| Y60-1762 | RETICLE REFERENCE MARK UNIT (L,R) |
| Y60-2012 | PA Hand Arm |
| Y60-4168 | DC MOTOR UNIT, 10W UNDER |
| Y60-4715 | TRANSFORMER SENSOR UNIT |
| Y75-0184 | |
| Y75-1020 | FUSE |
| Y75-1125 | MAGNETIC CONTACTOR(RELAY) |
| Y75-1126 | MAGNETIC CONTACTOR (RELAY) |
| Y75-2025 | SOLID STATE RELAY |
| Y75-2026 | SOLID STATE RELAY |
| Y75-4000 | TEMPERATURE SENSOR, (STG,LENS) |
| Y75-4001 | TEMPERATURE SENSOR CABLE |
| Y75-4088 | TRANSFORMER, 200VA |
| Y75-4122 | Temperature Controller |
| Y75-6026 | Power Module |
| Y75-6026 | Power Module |
| Y75-6036 | PDU -3EA |
| Y75-6036 | PDU -3EA |
| Y75-6333 | CYLINDER,AL,FUJIKURA GOMU |
| Y75-6334 | PISTON,AL,FUJIKURA GOMU |
| Y75-6749 | DISPLACEMENT SENSOR ASS'Y - Piezo |
| Y78-0039 | |
| Y78-0069 | |
| Y78-0088 | Reticle Cassette Robot Arm |
| Y78-0134 | UL31 AA Type |
| Y78-0135 | |
| Y78-0135 | |
| Y78-0136 | 2nd Zoom Lens Fix |
| Y78-0136 | 2nd Zoom Lens Fix (Japan) |
| Y78-0175 | |
| Y78-0201 | |
| Y78-0202 | |
| Y78-0205 | ND Filter |
| Y78-0206 | |
| Y78-0207 | |
| Y78-0209 | |
| Y78-0210 | |
| Y78-2006 | F23 Cable |
| Y78-2040 | |
| Y78-2047 | Cable |
| Y78-2130 | |
| Y78-2133 | |
| Y78-2140 | |
| Y78-2141 | |
| Y78-2142 | |
| Y78-2293 | Motor |
| Y78-2322 | Special Filter |
| Y78-2454 | NA MOTER |
| Y78-2456 | Cable |
| Y78-2456 | |
| Y78-2542 | |
| Y78-2543 | Scope Fiber Set(PDA?) |
| Y78-3052 | |
| Y78-3981 | Stage Flexible cable |
| X-Terminal panel | |
| MAGNETIC VALVE ( Big ) | |
| MAGNETIC VALVE ( Small ) | |
| i4 Z Ball Screw | |
| SCH Robot X driving Belt | |
| i2 Send Hand Robot Finger Arm | |
| 데구치 Glass | |
| Wafer Feeder In-Line Unit | |
| 2nd Zoom Lens Fix | |
| PPC Unit | |
| ikegami CRT Monitor | |
| R/C CPU PCB | |
| FRA / TTL AA / BC Scope / Zygo Optic Fiber | |
| TTL AA Optic Fiber Reference-2EA, Measure-2EA | |
| Turn Table Unit (XYZ Sensor Target) | |
| CCD OPTF Unit-iW | |
| AC/DC Power Supply Unit | |
| C Scope / No Camera | |
| B Scope / Camera exist | |
| Collimator Lens | |
| iW Input Lens | |
| OA Scope ( Camera included ) | |
| B/C Scope Mirror ( Reflector ) | |
| Laser Interferometer Unit | |
| Laser Interferometer Pick Up Unit | |
| Bar Mirror X, Y(i2) | |
| Chuck Maint Unit | |
| Collimator Lens | |
| Piping Unit Sol Valve | |
| Piping Unit Magnetic Valve | |
| FRA switching Unit | |
| WF Magnetic Velve | |
| AA / FRA Pick Up Unit | |
| AA / FRA ND Filter | |
| UPS electric Cable | |
| MEASUREMENT Cable | |
| UPS | |
| HEAD AMP PCB ASS'Y | |
| Unifomity Detector | |
| FLSS Unit | |
| MO Driver Unit | |
| UPS Bypass Cable | |
| ND Filter SET | |
| D-RACK FAN | |
| i4 reference Mark | |
| i5 reference Mark | |
| iW reference Mark | |
| 2ND CONDENSER LENS Driving | |
| 2ND CONDENSER LENS Fix | |
| key Board | |
| Servo Mount Air 배관 Unit | |
| Flexible Cable | |
| Stage Linear Bearing | |
| iW SPF Filter | |
| Sensor Cable | |
| X-Terminal BNC Cable | |
| PA Servo Module | |
| PA Wafer detect sensor AMP | |
| i4 Reference Light Pick Up Unit | |
| i5 Pin Theta AMP | |
| i4 Mount Piping Unit CH3 | |
| i4 Mount Piping Unit CH1 | |
| EX6 Barometer | |
| i5 SRC Cable AMP | |
| i4 Stage Air Pad | |
| i5 Berofram regurator | |
| Reticle Cassette bar Code Reader | |
| Mouse | |
| SRC, Pin Theta Cable Sersor | |
| Piezo Cable | |
| UC Detecor | |
| iW UC Detecor | |
| i2 Temp Sensor Cable | |
| PA Chuck | |
| In-Line Wafer detect Sensor | |
| 3rd Cover Glass | |
| i-Line Filter |