한국어

TEL / DNS Track Model

Tel Track Mark V, Mark Vz, Mark7, Mark8, Act-8, Act-12
DNS Track DNS60, DNS80 series


Service

 Refurbish, Relocation, Installation, Modification
 Manufaturing - Auto Drain system, Manual Coater, Chemical Mixing System,
Hot plate module, LED Coater/Developer, Mark-Vz Load/Unload/Align Unit

 New Brand Wafer Track System
    - 2" ~ 6" Round wafer, Process (Coater, Developer, Scrubber)
    - 8" ~ 12" Round wafer, Process (Coater, Developer, Scrubber)
    - 5" ~7" Square Type, Process (
Coater, Developer, Etcher, Stripper)