Canon Stepper Model

Canon Aligner PLA500, PLA600, MPA500, MPA600
Canon Stepper FPA-1550M3, FPA-2000i1, FPA-2500i2, FPA-2500i3
Canon Stepper FPA-3000i4, FPA-3000i5, FPA-3000i5+,
Canon Stepper FPA-3000EX3, FPA-3000EX4, FPA-3000EX5, FPA-3000EX6

Service

Repair , Relocation, Replacements, Upgrade EWS, Overhaul , Adjustment,
Trouble Shooting, Calibration, Spare Parts Supply

 AC/DC Power supply                                                X-Terminal(3000Series), Interferometer Laser
 All Power Module                                                      ThetaZ Tilt unit(2500series)
 Illumination(IL CD)/Mount/D-Rack/Stage PCB           Reticle (Cassette) Robot, Wafer SendHand Robot

Lithography Process Training
Canon Stepper Lens performance check