English
TEL Track Spare Parts
| NO | Machine | Unit | Description | Vendor P/N | Maker | ETC |
| 1 | MK-V | C/S | MAP TERMINAL BOARD ASS''Y | 381-639332-4 | TEL | |
| 2 | MK-V | C/S | MAP SENSOR(LASER) ASS'Y | 386-439256-3 | TEL | |
| 3 | MK-V | C/S | MAP SENSOR(TR) ASS'Y | 386-439257-3 | TEL | |
| 4 | MK-V | C/S | INDEXER MOTOR ASS'Y | 386-439018-2 | VEXTA | |
| 5 | MK-V | C/S | INDEXER CONNECTION BOARD ASS'Y | 381-639008-4 | TEL | |
| 6 | MK-V | C/S | C/S ARM PINCETTE(AR2-3200) | 1380-000929-11 | TEL | KZA-05615-0 |
| 7 | MK-V | C/S | C/S ARM X-MOTOR ASS'Y | 386-439025-2 | VEXTA | |
| 8 | MK-V | C/S | C/S THETA MOTOR ASS'Y | 386-439020-2 | VEXTA | |
| 9 | MK-V | C/S | C/S Y-MOTOR ASS'Y | 386-439030-3 | VEXTA | |
| 10 | MK-V | C/S | AL GUIDE IN/OUT AIR CYLINDER | 024-006878-1 | SMC | CU6-10D-XB9 |
| 11 | MK-V | C/S | AL PIN SUPPORT UP/DOWN AIR CYLINDER | 024-006877-1 | SMC | CU10-20D-XB9 |
| 12 | MK-V | C/S | C/S WAFER SENSOR ASS'Y(SEPARATE) | 386-440694-7 | ||
| 13 | MK-V | M/A | M/A X1-MOTOR ASS'Y | 386-439084-2 | SANYO DENKI | |
| 14 | MK-V | M/A | M/A X2-MOTOR ASS'Y | 386-439085-2 | SANYO DENKI | |
| 15 | MK-V | M/A | 6" WAFER BLOCK | 310-494363-1 | TEL | |
| 16 | MK-V | M/A | SEPARATE TYPE M/A WAFER SENSOR | 386-440693-5 | ||
| 17 | MK-V | M/A | 6" PINCETTE W | 310-391940-2 | TEL | |
| 18 | MK-V | M/A | M/A Y-MOTOR ASS'Y | 386-439072-4 | SANYO DENKI | |
| 19 | MK-V | M/A | M/A Z-MOTOR ASS'Y | 386-439075-6 | SANYO DENKI | |
| 20 | MK-V | M/A | M/A THETA MOTOR ASS'Y | 386-439076-2 | SANYO DENKI | |
| 21 | MK-V | M/A | M/A THETA TIMING BELT | 023-100882-1 | 270XL-025 | |
| 22 | MK-V | M/A | M/A Y-MOTOR DRIVER ASS'Y | 040-211491-1 | TEL | UD2115 |
| 23 | MK-V | M/A | M/A Z-MOTOR DRIVER ASS'Y | 040-211491-1 | TEL | UD2115 |
| 24 | MK-V | M/A | M/A UNIT CONN. BOARD A ASS'Y | 381-639050-6 | TEL | |
| 25 | MK-V | M/A | M/A UNIT CONN. BOARD B ASS'Y | 381-639051-3 | TEL | |
| 26 | MK-V | M/A | M/A UNIT CONN. BOARD C ASS'Y | 381-639052-3 | TEL | |
| 27 | MK-V | COAT | AC SERVO MOTOR | 380-090056-3 | PANASONIC | MFA02HA2NS-F |
| 28 | MK-V | COAT | AC SERVO MOTOR | 380-090055-3 | YASKAWA | USAHEM-02TE17 |
| 29 | MK-V | COAT | NOZZLE CHANGER MOTOR ASS'Y | 386-439153-2 | VEXTA | |
| 30 | MK-V | COAT | SPIN CHUCK UP/DOWN AIR CYLINDER | 024-005671-1 | SMC | CQ2B32-40D-XB9 |
| 31 | MK-V | COAT | NOZZLE LOCK AIR CYLINDER | 024-007086-1 | SMC | CJ1D10-E0004-15 |
| 32 | MK-V | COAT | MTR SCAN UP/DOWN AIR CYLINDER | 024-006579-1 | SMC | CU16-25D |
| 33 | MK-V | COAT | SPIN MTR SCAN ARM MOTOR ASS'Y | 386-439152-2 | VEXTA | |
| 34 | MK-V | COAT | SPIN UNIT CONNECTION BOARD | 381-639123-5 | TEL | |
| 35 | MK-V | COAT | SPIN UNIT CONNECTION BOARD #2 | 381-643196-2 | TEL | |
| 36 | MK-V | COAT | SPIN CHUCK VAC. SOL ASS'Y | 386-439165-3 | USG3-6-2-E-DC12V(1m) | |
| 37 | MK-V | COAT | EBR NOZZLE IN/OUT AIR CYLINDER | 024-008819-1 | SMC | CU10-5D-XB9 |
| 38 | MK-V | COAT | CYL' SCAN UP/DOWN AIR CYLINDER | 024-007218-1 | SMC | CDU20-40D-90L |
| 39 | MK-V | COAT | COAT 6" CATCH CUP ASS'Y | 1985-414351-13 | TEL | |
| 40 | MK-V | COAT | CYL' SCAN IN/OUT ROTARY ACTUATOR | 024-007219-1 | SMC | CDRB1BW20-0137-R80L |
| 41 | MK-V | DEV | AC SERVO MOTOR | 380-090056-3 | PANASONIC | MFA02HA2NS-F |
| 42 | MK-V | DEV | AC SERVO MOTOR | 380-090055-3 | YASKAWA | USAHEM-02TE17 |
| 43 | MK-V | DEV | MTR SCAN UP/DOWN AIR CYLINDER | 024-006579-1 | SMC | CU16-25D |
| 44 | MK-V | DEV | SPIN MTR SCAN ARM MOTOR ASS'Y | 386-439152-2 | VEXTA | |
| 45 | MK-V | DEV | SPIN CHUCK UP/DOWN AIR CYLINDER | 024-005671-1 | SMC | CQ2B32-40D-XB9 |
| 46 | MK-V | DEV | MTR SCAN UP/DOWN AIR CYLINDER | 024-006579-1 | SMC | CU16-25D |
| 47 | MK-V | DEV | CYL' SCAN UP/DOWN AIR CYLINDER | 024-007218-1 | SMC | CDU20-40D-90L |
| 48 | MK-V | DEV | CYL' SCAN IN/OUT ROTARY ACTUATOR | 024-007219-1 | SMC | CDRB1BW20-0137-R80L |
| 49 | MK-V | DEV | CUP UP/DOWN CYLINDER | 024-007109-1 | SMC | CG1BN25-55-XB9 |
| 50 | MK-V | DEV | SPIN UNIT CONNECTION BOARD | 381-639123-5 | TEL | |
| 51 | MK-V | DEV | SPIN UNIT CONNECTION BOARD #2 | 381-643196-2 | TEL | |
| 52 | MK-V | DEV | DEV 6" CATCH CUP ASS'Y(PVC) | 385-302010-2 | TEL | |
| 53 | MK-V | DEV | SPIN CHUCK VAC. SOL ASS'Y | 386-439165-3 | ||
| 54 | MK-V | HEAT | TEMP CONN. BOARD ASS'Y | 381-639102-2 | TEL | |
| 55 | MK-V | HEAT | OVER HET ALM BOARD ASS'Y | 381-639176-7 | TEL | |
| 56 | MK-V | HEAT | HP HEATER ASS'Y | 1386-450008-11 | TEL | |
| 57 | MK-V | HEAT | DHP HEATER ASS'Y | 1386-456035-12 | TEL | |
| 58 | MK-V | HEAT | 3-PIN(PHI 3) | 310-491708-1 | TEL | |
| 59 | MK-V | HEAT | PLATE UP/DOWN AIR CYLINDER | 024-005736-1 | SMC | CQ2B25-25D-XB9 |
| 60 | MK-V | HEAT | COOLING PLATE | 1380-000761-11 | SMC | INR-244-82-B |
| 61 | MK-V | HEAT | COOLING PLATE | 1380-000972-11 | KOMATS | CU-39/413-F3-033 |
| 62 | MK-V | HEAT | 3-PIN | 1910-424628-12 | TEL | |
| 63 | MK-V | HEAT | 3-PIN UP/DOWN AIR CYLINDER | 024-011441-1 | SMC | CQ2B25-J0616-20 |
| 64 | MK-V | HEAT | AD HEATER ASS'Y | 1386-450007-12 | TEL | |
| 65 | MK-V | HEAT | CIRCULATOR | 1380-000549-11 | SMC | INR-244-103B-2 |
| 66 | MK-V | HEAT | COOLING CONTROLLER | 1380-000589-11 | SMC | INR-244-97B-A |
| 67 | MK-V | WEE | EE THETA MOTOR ASS'Y | 386-439753-1 | VEXTA | |
| 68 | MK-V | WEE | EE X-MOTOR ASS'Y | 386-439754-1 | VEXTA | |
| 69 | MK-V | I/F | CHUCK UP/DOWN AIR CYLINDER | 024-007494-1 | SMC | CDQP2B16-10DC-XB9-A76HL |
| 70 | MK-V | I/F | FREE MOUNT AIR CYLINDER | 024-007496-1 | SMC | CU10-30DXB9 |
| 71 | MK-V | I/F | I/F Y-MOTOR ASS'Y | 386-439414-2 | VEXTA | |
| 72 | MK-V | I/F | I/F THETA-MOTOR ASS'Y | 386-439411-3 | VEXTA | |
| 73 | MK-V | I/F | I/F X-MOTOR ASS'Y | 386-439412-2 | VEXTA | |
| 74 | MK-V | I/F | INDEXER MOTOR ASS'Y | 386-439018-2 | VEXTA | |
| 75 | MK-Vz | C/S | C/S ARM CONNECTION BOARD ASS'Y | 1381-650052-11 | TEL | |
| 76 | MK-Vz | C/S | C/S ARM X,THETA MOTOR DRIVER | 040-000908-1 | TEL | CSD5814N-P |
| 77 | MK-Vz | C/S | C/S ARM Y-MOTOR DRIVER | 040-000752-1 | TEL | CSD5807N-P |
| 78 | MK-Vz | C/S | DC POWER BOX | 1380-000983-14 | TEL | DPB-CT-01A |
| 79 | MK-Vz | C/S | PERSONAL COMPUTER | 050-001142-1 | NEC | FC-9821KE |
| 80 | MK-Vz | C/S | UPS | 1386-002656-11 | TEL | BMT300-1GM-TS |
| 81 | MK-Vz | C/S | PLASMA DISPLAY POWER SUPPLY UNIT | 049-000577-1 | TEL | FPF07P-AC100 |
| 82 | MK-Vz | C/S | PLASMA DISPLAY | 1987-412433-1 | TEL | |
| 83 | MK-Vz | C/S | INDEXER CONNECTION BOARD ASS'Y | 1381-650051-12 | TEL | |
| 84 | MK-Vz | C/S | INDEXER MOTOR ASS'Y | 1386-452721-11 | VEXTA | |
| 85 | MK-Vz | C/S | INDEXER MOTOR DRIVER | 040-000908-1 | TEL | CSD5814N-P |
| 86 | MK-Vz | C/S | C/S ARM PINCETTE(AR2-3200) | 1380-000929-11 | TEL | CONSUMABLE PARTS |
| 87 | MK-Vz | C/S | C/S ARM X-MOTOR ASS'Y | 1386-448029-11 | VEXTA | |
| 88 | MK-Vz | C/S | C/S ARM THETA MOTOR ASS'Y | 1386-448034-11 | VEXTA | |
| 89 | MK-Vz | C/S | C/S ARM Y-MOTOR ASS'Y | 1386-448007-12 | VEXTA | |
| 90 | MK-Vz | C/S | PHOTOELECTRIC SWITCH AMP | 036-002916-1 | E3X-NT11 | |
| 91 | MK-Vz | C/S | SENSOR FIBER | 036-100315-1 | E32-TC200 | |
| 92 | MK-Vz | C/S | SENSOR PARTS SIDE VIEW UNIT | 036-002255-1 | E39-F2-1/2 | |
| 93 | MK-Vz | C/S | A/S PIN SUPPORT UP/DOWN AIR CYLINDER | 024-010720-1 | SMC | CJ2D10-45-XB9 |
| 94 | MK-Vz | C/S | VZ AL STAGE WAFER SENSOR ASS'Y | 1386-447990-12 | ||
| 95 | MK-Vz | C/S | MAP SENSOR ASS'Y FL | 1386-450111-13 | E32-T24S | |
| 96 | MK-Vz | M/A | M/A H.S X-MOTOR ASS'Y | 1386-448392-12 | SANYO DENKI | |
| 97 | MK-Vz | M/A | M/A H.S CONN' "C" BOARD | 1381-650034-11 | TEL | |
| 98 | MK-Vz | M/A | M/A H.S Y-MOTOR ASS'Y | 1386-448421-12 | PANASONIC | |
| 99 | MK-Vz | M/A | M/A H.S CONN' "A" BOARD | 1381-650032-11 | TEL | |
| 100 | MK-Vz | M/A | M/A H.S THETA MOTOR ASS'Y | 1386-448384-12 | SANYO DENKI | |
| 101 | MK-Vz | M/A | M/A H.S Z- MOTOR ASS'Y | 1386-448385-12 | PANASONIC | |
| 102 | MK-Vz | M/A | M/A H.S CONN' "B" BOARD | 1381-650033-11 | TEL | |
| 103 | MK-Vz | M/A | 6" WAFER BLOCK(2P-45-F) | 1910-428814-13 | TEL | |
| 104 | MK-Vz | M/A | 6" WAFER BLOCK | 1910-455170-11 | TEL | HIGH TEMP TYPE |
| 105 | MK-Vz | M/A | 6" PINCETTE W | 310-391940-3 | TEL | |
| 106 | MK-Vz | M/A | M/A X-MOTOR DRIVER | 040-570216-1 | TEL | PMM-BD5702-4 |
| 107 | MK-Vz | M/A | M/A Y-MOTOR DRIVER | 1380-002052-11 | PANASONIC | MSD011A1XX10 |
| 108 | MK-Vz | M/A | M/A Z-MOTOR DRIVER | 1380-002054-11 | PANASONIC | MSD011A1XX12 |
| 109 | MK-Vz | M/A | MAIN ARM H.S DRIVER I/F BOARD | 1381-650031-13 | TEL | |
| 110 | MK-Vz | COAT | SPIN UNIT CONNECTION BOARD 2 | 381-643196-6 | TEL | |
| 111 | MK-Vz | COAT | AC SERVO MOTOR | 1380-000500-11 | PANASONIC | MFA030HA2NSR |
| 112 | MK-Vz | COAT | AC SERVO MOTOR | 380-090055-6 | YASKAWA | USAHEM-03TE31 |
| 113 | MK-Vz | COAT | AC SERVO MOTOR | 1380-001406-13 | SANYO DENKI | 62BM006DXEAS-D |
| 114 | MK-Vz | COAT | SERVO MOTOR DRIVER | 1380-000920-12 | PANASONIC | DV-467TC |
| 115 | MK-Vz | COAT | SPIN MTR SCAN ARM MOTOR ASS'Y | 386-439152-2 | VEXTA | |
| 116 | MK-Vz | COAT | MK-7,8 SIDE RINSE MOTOR ASS'Y | 1386-451848-12 | VEXTA | |
| 117 | MK-Vz | COAT | NOZZLE CHANGER MOTOR ASS'Y | 386-439153-2 | VEXTA | |
| 118 | MK-Vz | COAT | COAT 6" CATCH CUP ASS'Y | 1985-414351-13 | TEL | |
| 119 | MK-Vz | COAT | SPIN CHUCK(PHI80) | 1380-001253-13 | TEL | |
| 120 | MK-Vz | COAT | SPIN CHUCK VAC SOL ASS'Y | 386-439165-3 | ||
| 121 | MK-Vz | COAT | SPIN CHUCK UP/DOWN AIR CYLINDER | 024-005671-1 | SMC | CQ2B32-40D-XB9 |
| 122 | MK-Vz | COAT | ARM-1 UP/DOWN AIR CYLINDER | 024-006579-1 | SMC | CU16-25D |
| 123 | MK-Vz | COAT | NOZZLE LOCK-UNLOCK AIR CYLINDER | 024-014184-1 | SMC | MHQ2-16D-X1737 |
| 124 | MK-Vz | COAT | EBR NOZZLE IN/OUT AIR CYLINDER | 024-008819-1 | SMC | CU10-5D-XB9 |
| 125 | MK-Vz | COAT | EBR UP/DOWN AIR CYLINDER | 024-011624-1 | SMC | CZLS-SD25-50-A |
| 126 | MK-Vz | DEV | AC SERVO MOTOR | 1380-001406-13 | SANYO DENKI | 62BM006DXEAS-D |
| 127 | MK-Vz | DEV | AC SERVO MOTOR | 1380-000500-11 | PANASONIC | MFA030HA2NSR |
| 128 | MK-Vz | DEV | SERVO MOTOR DRIVER | 1380-001508-12 | SANYO DENKI | 65BA030EXKT0-C |
| 129 | MK-Vz | DEV | E2 NOZZLE ASS'Y | 1985-451601-11 | TEL | |
| 130 | MK-Vz | DEV | DEV 6" CATCH CUP ASS'Y(PVC) | 385-302010-2 | TEL | |
| 131 | MK-Vz | DEV | CUP UP/DOWN AIR CYLINDER | 024-007109-1 | SMC | CG1BN25-55-XB9 |
| 132 | MK-Vz | HEAT | HP HEATER ASS'Y | 1386-450008-11 | TEL | |
| 133 | MK-Vz | HEAT | DHP HEATER ASS'Y | 1386-456035-12 | TEL | |
| 134 | MK-Vz | HEAT | 3-PIN(PHI 3) | 310-491708-1 | TEL | |
| 135 | MK-Vz | HEAT | PLATE UP/DOWN AIR CYLINDER | 024-005736-1 | SMC | CQ2B25-25D-XB9 |
| 136 | MK-Vz | HEAT | COOLING PLATE | 1380-000761-11 | SMC | INR-244-82-B |
| 137 | MK-Vz | HEAT | COOLING PLATE | 1380-000972-11 | KOMATS | CU-39/413-F3-033 |
| 138 | MK-Vz | HEAT | 3-PIN | 1910-424628-12 | TEL | |
| 139 | MK-Vz | HEAT | 3-PIN UP/DOWN AIR CYLINDER | 024-011441-1 | SMC | CQ2B25-J0616-20 |
| 140 | MK-Vz | HEAT | AD HEATER ASS'Y | 1386-450007-12 | TEL | |
| 141 | MK-Vz | HEAT | AD VAPOR SUPPLY & ATMOS VALVE | 012-001007-1 | CKD | AMD01-X20 |
| 142 | MK-Vz | HEAT | AD CHAMBER VAC. VALVE | 012-006101-1 | CKD | AMD01-X60 |
| 143 | MK-Vz | HEAT | AD CHAMBER EXHAUST VALVE | 012-001011-1 | CKD | AMD21-X20 |
| 144 | MK-Vz | HEAT | OVER HEAT ALM BOARD ASS'Y | 381-639176-A | TEL | |
| 145 | MK-Vz | HEAT | SSR | 037-000492-1 | G3NA-210B DC5-24V | |
| 146 | MK-Vz | HEAT | CIRCULATOR | 1380-002161-12 | SMC | INR-244-112D |
| 147 | MK-Vz | HEAT | COOLING POWER SUPPLY | 1380-002161-12 | SMC | INR-244-116C |
| 148 | MK-Vz | HEAT | MULTI CONTROLLER | 1380-001017-14 | SMC | INR-244-110E |
| 149 | MK-Vz | HEAT | CONTROLLER TEMP' | 014-000259-1 | TEL | E5ZD-8H01P-2 |
| 150 | MK-Vz | WEE | WEE X-MOTOR ASS'Y | 1386-448811-12 | VEXTA | |
| 151 | MK-Vz | WEE | WEE THETA MOTOR ASS'Y | 1386-448815-11 | VEXTA | |
| 152 | MK-Vz | WEE | SHUTTER AIR CYLINDER | 024-014693-1 | TBDA10-40 | |
| 153 | MK-Vz | WEE | WEE CCD BOARD | 1381-648798-12 | TEL | |
| 154 | MK-Vz | I/F | I/F Y-MOTOR DRIVER | 040-001186-1 | TEL | PMM-BA-5603 |
| 155 | MK-Vz | I/F | I/F X-MOTOR DRIVER | 040-000951-1 | TEL | PMM-BD-5702-5 |
| 156 | MK-Vz | I/F | I/F THETA-MOTOR DRIVER | 040-000946-1 | TEL | PMM-BD-4502-6 |
| 157 | MK-Vz | I/F | COOLING PLATE | 1380-000763-12 | SMC | INR-244-83-B |
| 158 | MK-Vz | I/F | COOLING PLATE | 1380-000973-11 | KOMATS | CU-40/413-F3-034 |
| 159 | MK-Vz | I/F | SLIDE BLOCK | 1380-000778-12 | TAIYO | XTSB-2006-500RN |
| 160 | MK-Vz | I/F | DC POWER BOX | 1380-001131-13 | TEL | DPB-CT-02 |
| 161 | MK-7/ MK-8 | DC Power Box DPB-CT-01A | 1380-000983-14 | TEL | ||
| 162 | MK-7/ MK-8 | Personal Computer FC-9821KE | 050-001142-1 | NEC | 본체만 해당 됨 | |
| 163 | MK-7/ MK-8 | UPS BMT300-1GM-TS | 1380-002656-11 | TEL | ||
| 164 | MK-7/ MK-8 | Plasma Display Unit | 1987-412433-1 | TEL | ||
| 165 | MK-7/ MK-8 | C/S Pincette 8" | 310-290647-7 | TEL | ||
| 166 | MK-7/ MK-8 | C/S Pincette 6" | 1310-290833-13 | TEL | ||
| 167 | MK-7/ MK-8 | C/S X Motor Assy | 1380-101264-11 | SANYO DENKI | ||
| 168 | MK-7/ MK-8 | MAP Sensor(8") + AMP | 1987-423283-11 | TEL | ||
| 169 | MK-7/ MK-8 | MAP Sensor(6") + AMP | 1987-423284-11 | TEL | ||
| 170 | MK-7/ MK-8 | C/S X-axis driver | 1380-100625-11 | SANYO DENKI | ||
| 171 | MK-7/ MK-8 | Map in/out air cylinder | 024-011601-1 | TAIYO | ||
| 172 | MK-7/ MK-8 | 4-Pin up/down air cylinder | 024-011644-1 | SMC | ||
| 173 | MK-7/ MK-8 | C/S Y-axis timing belt(小) | 023-000832-1 | MBL | ||
| 174 | MK-7/ MK-8 | C/S Y-axis motor ass'y | 1380-011257-11 | PANASONIC | ||
| 175 | MK-7/ MK-8 | C/S Z-axis motor | 1380-001258-11 | PANASONIC | ||
| 176 | MK-7/ MK-8 | C/S Z-axis belt | 1380-100546-11 | MBL | ||
| 177 | MK-7/ MK-8 | C/S Z-axis driver | 040-011776 | PANASONIC | ||
| 178 | MK-7/ MK-8 | C/S Y-axis driver | 040-011776 | PANASONIC | ||
| 179 | MK-7/ MK-8 | Pin up/down solenoid v/v | 012-001314-1 | TAIYO | ||
| 180 | MK-7/ MK-8 | Map set solenoid v/v | 012-001314-1 | TAIYO | ||
| 181 | MK-7/ MK-8 | M/A X-axis timing belt | 023-000043-1 | TEL | B60S3M789G | |
| 182 | MK-7/ MK-8 | M/A X-axis motor ass'y | 1386-453088-12 | SANYO DENKI | 103-7555-7043 | |
| 183 | MK-7/ MK-8 | M/A Y-axis timing belt(small size) | 023-000055-1 | TEL | 345-3GT-15 | |
| 184 | MK-7/ MK-8 | M/A Y-axis motor ass'y | 1386-448421-12 | PANASONIC | MSMA011A1A | |
| 185 | MK-7/ MK-8 | M/A Z-axis motor ass'y | 040-001059-1 | PANASONIC | MSM021ABF | |
| 186 | MK-7/ MK-8 | M/A Theta-axis motor ass'y | 1386-456663-12 | SANYO DENKI | 103H7522-80E3 | |
| 187 | MK-7/ MK-8 | M/A Theta-axis timing belt | 023-001280-1 | TEL | 687-3GT-8 | |
| 188 | MK-7/ MK-8 | M/A Wafer block | 1910-455170-11 | TEL | 6INCH | |
| 189 | MK-7/ MK-8 | M/A Y-axis driver | 1380-002668-11 | PANASONIC | MSD011A1XX18 | |
| 190 | MK-7/ MK-8 | M/A Z-axis driver | 1380-002670-11 | PANASONIC | MSD021A1XX17 | |
| 191 | MK-7/ MK-8 | M/A X-axis driver | 040-570216-1 | SANYO DENKI | PMM-BD-5702-4 | |
| 192 | MK-7/ MK-8 | M/A Pincette 5" | 1310-392515-13 | TEL | 5INCH | |
| 193 | MK-7/ MK-8 | M/A Wafer block 8" | 1904-300126-11 | TEL | 8INCH | |
| 194 | MK-7/ MK-8 | M/A Pincette 6" | 1310-392516-13 | TEL | 6INCH | |
| 195 | MK-7/ MK-8 | M/A Pincette 8" | 1910-355178-11 | TEL | 8INCH | |
| 196 | MK-7/ MK-8 | Damper solenoid v/v | 012-001833-1 | SMC | VJ3133T | |
| 197 | MK-7/ MK-8 | E.B.R solenoid v/v | 012-001827-1 | SMC | VJ314MT | |
| 198 | MK-7/ MK-8 | B/R solenoid v/v | SMC | |||
| 199 | MK-7/ MK-8 | RRC solenoid v/v | SMC | |||
| 200 | MK-7/ MK-8 | Solvent bath solenoid v/v | SMC | |||
| 201 | MK-7/ MK-8 | CYLSCN U/D solenoid v/v | SMC | |||
| 202 | MK-7/ MK-8 | CYLSCN I/O solenoid v/v | 012-001832-1 | SMC | VJ3233T | |
| 203 | MK-7/ MK-8 | Nozzle unlock solenoid v/v | 012-001829-1 | SMC | VJ314MT | |
| 204 | MK-7/ MK-8 | MTRSCN U/D solenoid v/v | 012-001832-1 | SMC | VJ3233T | |
| 205 | MK-7/ MK-8 | Chuck U/D solenoid v/v | SMC | |||
| 206 | MK-7/ MK-8 | PR pump solenoid v/v | 012-002874-1 | SMC | VJ3313Y | |
| 207 | MK-7/ MK-8 | VAC' solenoid v/v | 012-000333-1 | CKD | USG3-X0256 | |
| 208 | MK-7/ MK-8 | Spin AC Servo Motor | 1380-000500-12 | PANASONIC | MFA030HA2NSK | |
| 209 | MK-7/ MK-8 | Spin AC Servo Motor Driver | 1380-000501-12 | PANASONIC | DV468TC | |
| 210 | MK-7/ MK-8 | Catch cup ass'y | 1985-416102-14 | TEL | 6INCH | |
| 211 | MK-7/ MK-8 | solvent filter | PALL | DFA1NIEYSW44 | ||
| 212 | MK-7/ MK-8 | PR filter | PALL | MCD9116UNAEJ | ||
| 213 | MK-7/ MK-8 | Chuck up/down air cylinder | 024-005671-1 | SMC | CQ2B32-40D-XB9 | |
| 214 | MK-7/ MK-8 | O-Ring(Vacuum seal) | 027-101869-1 | TEL | PARFLO AS568-13 BLACK | |
| 215 | MK-7/ MK-8 | Arm-1 up/down air cylinder | 024-010531-1 | SMC | CDU16-30D-90-XB9 | |
| 216 | MK-7/ MK-8 | Spin MTR scan arm motor ass'y | 386-440775-1 | VEXTA | PH265M-31B | |
| 217 | MK-7/ MK-8 | Top rinse in/out air cylider | 024-011140-1 | SMC | CQ2D20-F8623-25 | |
| 218 | MK-7/ MK-8 | Spin chuck | 310-290498-2 | TEL | 6INCH | |
| 219 | MK-7/ MK-8 | Damper solenoid v/v | 012-001833-1 | SMC | VJ3133T | |
| 220 | MK-7/ MK-8 | B/R solenoid v/v | 012-001829-1 | SMC | VJ314MT | |
| 221 | MK-7/ MK-8 | Rinse solenoid v/v | SMC | |||
| 222 | MK-7/ MK-8 | DEV solenoid v/v | SMC | |||
| 223 | MK-7/ MK-8 | Arm 1 U/D solenoid v/v | 012-001832-1 | SMC | VJ3233T | |
| 224 | MK-7/ MK-8 | Chuck U/D solenoid v/v | SMC | |||
| 225 | MK-7/ MK-8 | Arm2 I/O solenoid v/v | SMC | |||
| 226 | MK-7/ MK-8 | Arm2 U/D solenoid v/v | 012-001833-1 | SMC | VJ3133T | |
| 227 | MK-7/ MK-8 | Cup U/D solenoid v/v | SMC | |||
| 228 | MK-7/ MK-8 | VAC' solenoid v/v | 012-000333-1 | CKD | USG3-X0256 | |
| 229 | MK-7/ MK-8 | Spin AC Servo Motor | 1380-001406-14 | SANYO DENKI | 62BM006DXEAS | |
| 230 | MK-7/ MK-8 | Spin AC Servo Motor Drive | 1380-001508-12 | SANYO DENKI | 65BA030EXKTO | |
| 231 | MK-7/ MK-8 | DEV filter | PALL | DFA1NIEYSW44 | ||
| 232 | MK-7/ MK-8 | Rinse filter | PALL | |||
| 233 | MK-7/ MK-8 | B/R filter | PALL | |||
| 234 | MK-7/ MK-8 | 3-Pin up/down air cylinder | 024-015109-1 | KOGANEI | JDAS20*20-1331W | |
| 235 | MK-7/ MK-8 | Shutter up/down air cylinder | 024-015960-1 | KOGANEI | JDAS20*25-1332W | |
| 236 | MK-7/ MK-8 | Bake solenoid v/v | 012-004980-1 | CKD | 4SB019 | |
| 237 | MK-7/ MK-8 | 3-Pin | 1910-426349-13 | TEL | ||
| 238 | MK-7/ MK-8 | Iwaki Bellows Pump | 011-000834-1 | CKD | SB-3TH-M-N-E3 | |
| 239 | MK-7/ MK-8 | P/R Operator v/v | 012-005217-1 | CKD | AMDSZ0-X25 | |
| 240 | MK-7/ MK-8 | EBR Operator v/v | 012-001020-1 | CKD | AMDS00-X20 | |
| 241 | MK-7/ MK-8 | Back-Rinse Operator v/v | 012-001767-1 | CKD | AMDZ1-X10 | |
| 242 | MK-7/ MK-8 | Solvent Bath Operator v/v | 012-001767-1 | CKD | AMDZ1-X10 | |
| 243 | MK-7/ MK-8 | RRC operator v/v | 012-001767-1 | CKD | AMDZ1-X10 | |
| 244 | MK-7/ MK-8 | Develop Operator v/v | 012-002379-1 | KOGANEI | F-AVP125-1W | |
| 245 | MK-7/ MK-8 | Rinse Operator v/v | 012-002379-1 | KOGANEI | F-AVP125-1W | |
| 246 | MK-7/ MK-8 | Chemical box | 012-002121-1 | KOGANEI | F-DAVP125-3W | |
| 247 | MK-7/ MK-8 | Chemical box | 012-001012-1 | CKD | AMG20-X20 | |
| 248 | MK-7/ MK-8 | Chemical box | 012-002121-1 | KOGANEI | F-DAVP125-3W | |
| 249 | MK-7/ MK-8 | Chemical box | 012-002379-1 | KOGANEI | F-AVP125-1W | |
| 250 | MK-7/ MK-8 | Hmds Supply Operator v/v | 012-002848-1 | CKD | AMD01-X24 | |
| 251 | MK-7/ MK-8 | Hmds Vapor Operator v/v | 012-002121-1 | KOGANEI | F-DAVP125-3W | |
| 252 | MK-7/ MK-8 | Hmds Drain Operator v/v | 012-002379-1 | KOGANEI | F-AVP125-1W | |
| 253 | MK-7/ MK-8 | Hmds Bubbling Operator v/v | 012-002379-1 | KOGANEI | F-AVP125-1W | |
| 254 | MK-7/ MK-8 | Hmds Dillution Operator v/v | 012-002379-1 | KOGANEI | F-AVP125-1W | |
| 255 | MK-7/ MK-8 | MK-8 Coat cup Assy | 1985-419017-1 | TEL | ||
| 256 | MK-7/ MK-8 | SPIN unit CONN Board 2 | 381-643196-6 | TEL | ||
| 257 | MK-7/ MK-8 | E2 Nozzle Dummy Dispense Pannel | 1386-443389-14 | TEL | ||
| 258 | MK-7/ MK-8 | DEV E2 Nozzle Assy | 1985-414069-1 | TEL | ||
| 259 | MK-7/ MK-8 | DEV E2 Nozzle Bath Assy | 1985-411429-1 | TEL | ||
| 260 | MK-7/ MK-8 | MK-8 Rinse Nozzle Assy | 1385-391299-1 | TEL | ||
| 261 | MK-7/ MK-8 | MK-8 STD DEV CUP Assy | 1985-431018-1 | TEL | ||
| 262 | MK-7/ MK-8 | DEV H Nozzle Separation (8") Assy | 1385-490440-1 | TEL | ||
| 263 | MK-7/ MK-8 | LHP unit Assy | TEL | |||
| 264 | MK-7/ MK-8 | Cool Unit Assy | TEL | SMC TYPE | ||
| 265 | MK-7/ MK-8 | Cool Unit Assy | TEL | KOMATSU TYPE | ||
| 266 | MK-7/ MK-8 | Wee Unit Assy | TEL | |||
| 267 | MK-7/ MK-8 | Wee Lamp Housing Assy | TEL | |||
| 268 | MK-7/ MK-8 | Circulator | 1380-002161-12 | SMC | INR-244-112D | |
| 269 | MK-7/ MK-8 | Circulator | 1380-001172-13 | KOMATSU | MCE-52W-A | |
| 270 | MK-7/ MK-8 | Cooling power supply | 1380-001021-13 | SMC | INR-244-113C | |
| 271 | MK-7/ MK-8 | Cooling power supply | 1380-001174-12 | KOMATSU | MR-2015 | |
| 272 | MK-7/ MK-8 | Multicontroller | 1380-001017-14 | SMC | INR-244-110 | |
| 273 | MK-7/ MK-8 | Multicontroller | 1380-001337-13 | KOMATSU | FRD-8-B | |
| 274 | MK-7/ MK-8 | Interface Unit | TEL | L TO R NSR TYPE | ||
| 275 | MK-7/ MK-8 | Interface Unit | TEL | R TO L NSR TYPE | ||
| 276 | MK-7/ MK-8 | Interface Unit | TEL | R TO L Cannon TYPE |