No |
Part's No |
품명(Description) |
1 |
0100-09145 |
PCBA RS232VIDEO INTERC |
2 |
0100-00003 |
w PWB VME STEPPER CONT. I |
3 |
0100-09134 |
PCB ASSY DIDO FUSE |
4 |
0100-09020 |
wPCB ASSY, FUSE BOARD |
5 |
0100-09237 |
VME TO DUAL FREQ. INTERCONNECT BD |
6 |
0100-20143 |
PCB ASSY L LOCK WAFER SENSOR |
7 |
0100-09127 |
wPCB ASSY INTERCONN BD WAFER SENSOR |
8 |
0100-09011 |
wPCB ASSY, A1 MUX/CURREN SENSE |
9 |
0100-09041 |
PCB ASSY, HEAT EXCHNGR INTERFACE |
10 |
0190-35774 |
MULTIPLEXED I/O CONTROL BOARD, CH B |
11 |
0100-35066 |
CHAMBER PNEUMATIC INTERCONNECT BD |
12 |
0100-01792 |
PCB ASSY 5-PHASE STEPPER DRIVER INTERFA |
13 |
0100-35065 |
PCB ASSY SERIAL ISOLATOR |
14 |
0660-01809 |
Square D VME 30299-083 / Seriplex bus SPX VME6U1V2 |
15 |
0090-76015 |
AMAT Endura Centura V440 SBC SYNERGY 68040 |
16 |
0100-20181 |
Operator control panel with interlock switch |
17 |
0100-00423 |
PCB ASSY, SERIPLEX I/O DISTRIBUTION, GPLIS |
18 |
0100-20027 |
PCB Contactor Interlock Board |
19 |
0100-76055 |
Centerfinder Interface Board |
20 |
0190-00318 |
AMAT VGA Video Controller ASSY - P-3 486 BOARD |
21 |
0100-35054 |
CHAMBER INTERFACE BOARD |
22 |
0100-20040 |
Remote Supply Distribution Board (RF RACK) |
23 |
0100-35053 |
MAINFRAME INTERFACE BOARD |
24 |
0100-20038 |
RF GEN RACK REALY CONTROL |
25 |
0100-00893 |
PCB, TC GAUGE BOARD |
26 |
0100-00639 |
200MM SMIF LLK INTERLOCK PCB |
27 |
0190-35773 |
MULTIPLEXED I/O CONTROL BOARD, CH A |
28 |
1140-01045 |
DC POWER SUPPLY 15V |
29 |
1140-01046 |
DC POWER SUPPLY 12V |
30 |
0190-70052 |
DIGIPLAN AM5 STEPPING MOTOR DRIVE AMAT P5000 |
31 |
0010-09340 |
Susceptor Lift P5000 |
32 |
3870-01244 |
Foreline Valve NW40 |
33 |
0020-26574 |
PLATE CLEAR CHAMBER MONOLITH. P-5000 INTERFACE END CAP |
34 |
0020-26574 |
PLATE CLEAR CHAMBER MONOLITH. P-5000 INTERFACE END CAP |
35 |
0010-00957 |
Orienteer Laser 650nm |
36 |
0100-20073 |
PCB ASSY, WAFER DETECTO MAPPING |
37 |
0100-20073 |
PCB ASSY, WAFER DETECTO MAPPING |
38 |
0110-20169 |
PCB Wafer Mapping |
39 |
0020-21165 |
CLAMP 8" BUFFER FROG LEG WIRST ASS'Y |
40 |
0020-21025 |
CLAMP 8" BLADE TRANSFER FROG LEG WIRST ASS'Y |
41 |
0020-21112 |
CLAMP 6" BLADE BUFFER ROBOT WIRST ASS'Y |
42 |
0020-21114 |
BLADE 6" BUFFER ROBOT |
43 |
3690-03269 |
BRG LEADSCR&NUT ASSY .5DX.1LEADX4TRVLX |
44 |
0190-35463 |
MOTOR, 5 PHASE STEPPER W/ CABLE DXZ |
45 |
0190-35463 |
MOTOR, 5 PHASE STEPPER W/ CABLE DXZ |
46 |
0090-35123 |
MOTOR/BRAKE/ENCODER ASSYSTORAGE ELEV. CH-E |
47 |
0190-09372 |
ASSY, TC, HTR, WxZ |
48 |
0020-18053 |
Cathode GUIDE LIFT PIN |
49 |
|
MKS TRANSDUCER 10TORR |
50 |
0620-01164 |
CABLE ASSY 332CG 6"LG + 2.75" 15P-DSUB / Convectron Cable |
51 |
0240-18266 |
Gas Panel Fujikin Manual Valve |
52 |
3870-02221 |
VALVE BLOCK DIAPH 1/4VCR-M/F/F NC/NC VIM/Gas Panel 3way Valve |
53 |
3870-01173 |
USE 3800-01173 RGLTR PRESS SQ-MICRO 0-30 / Gas Panel Regulator |
54 |
1040-01121 |
MKS LOCAL DISPLAY MODULE LDM-A12PB2CC1 |
55 |
0190-01448 |
HOKE VALVE Long Supply Green Knob |
56 |
0190-01449 |
HOKE VALVE Long Return BLK Knob |
57 |
0190-01448 |
HOKE VALVE Long Supply Green Knob |
58 |
0190-01449 |
HOKE VALVE Long Return BLK Knob |
59 |
0020-31017 |
BUSHING TERMINAL BWCVD |
60 |
|
INSERTION FLOW SENSOR |
61 |
0150-76156 |
CABLE ASSY, INSERTION FLOW SENSOR |
62 |
0100-20040 |
REMOTE SUPPLY DISTRIBUTION BOARD |
63 |
0190-01448 |
HOKE VALVE Long Supply Green Knob |
64 |
0190-01449 |
HOKE VALVE Long Return BLK Knob |
65 |
0010-13018 |
TURCK FLOW CONTROL MONITOR, CONTROL SENSOR |
66 |
1140-01170 |
POWER SUPPLY SENSOR REALY 120/220/240VAC 400M |
67 |
|
POWER SUPPLY SENSOR REALY 120/220/240VAC 401M SOCKET |
68 |
|
MF FILTER PALL 3000PSI |
69 |
0200-36631 |
PLATE COVER 8INCH HEATER DXZ PATTERNED AL. DIHPLE |
70 |
0200-18109 |
COLLAR, 200MM SNNF, SML FLT, ULTIMA HDPCVD |
71 |
0040-33701 |
ALN Heater Block 200mm HDP CVD Ultima About this product |
72 |
1310-01059 |
Top TC PROBE DUAL CIRCUIT K-TYPE TFE-INSU |
73 |
0010-04542 |
HEATER, ASSY, 200MM FC WXZ PLUS OSCR |
74 |
0100-08483 |
CENTURA STD, MASS STORAGE MODULE AMAT -GEM |
75 |
0020-30335 |
TEFLON HOUSING QUARTZ TUBE SACVD |
76 |
|
ION Gauge Filament |
77 |
0020-28756 |
Cryo/Gate Valve Process Chamber Interface Stud, Centura Endura PVD |
78 |
0020-28756 |
Cryo/Gate Valve Process Chamber Interface Stud, Centura Endura PVD |
79 |
0020-07272 |
CRYO/GATE VALVE W/HEX SOCKET FOR W USED |
80 |
0020-07272 |
CRYO/GATE VALVE W/HEX SOCKET FOR W USED |
81 |
3090-01110 |
LOT 6 of BOLT 12PT HD 1/4-28 x 1-3/8 304/316 SST SLVRPLT |
82 |
0150-21692 |
CABLE ASSY. SQ RIGHT ANGLE W/ INTERLOCK |
83 |
0020-26574 |
PLATE CLEAR CHAMBER MONOLITH. P-5000 INTERFACE END CAP |
84 |
0020-26574 |
PLATE CLEAR CHAMBER MONOLITH. P-5000 INTERFACE END CAP |
85 |
0090-04135 |
Dwyer Photohelic Series 3000MR 24 VDC Pressure Switch Cable |
86 |
|
Banner BT13S FIBER OPTIC CABLE |
87 |
0150-20103 |
CABLE ASSY, CCD BD INT. |
88 |
|
TURCK WATER FLOW SENSOR CABLE |
89 |
0620-01164 |
Convectron Gauge Cable |
90 |
0150-76501 |
CENTURA FLOW MONITOR PIGTAIL. CABLE |
91 |
0150-13048 |
MOTOR DRIVER INTERFACE PCB CABLE ASSY |
92 |
0150-13048 |
MOTOR DRIVER INTERFACE PCB CABLE ASSY |
93 |
0150-36998 |
MOTOR DRIVER INTERFACE PCB CABLE ASSY |
94 |
0150-18079 |
CABLE ASSY, AC HTR TO INTLK INTFC HDP-CV |
95 |
0150-20197 |
HARNESS ASSY, TC GAUGE INTERFACE |
96 |
0150-18079 |
CABLE ASSY, AC HTR TO INTLK INTFC HDP-CVD |
97 |
0150-35141 |
FLOPPY DRIVE POWER CABLE |
98 |
|
3Phase 30A |
99 |
|
3Phase 20A |
100 |
|
3Phase 40A |
101 |
|
3Phase 50A |
102 |
|
3Phase 60A |
103 |
|
|
104 |
|
2Phase 40A |
105 |
|
2Phase 10A |
106 |
|
2Phase 20A |
107 |
|
2Phase 15A |
108 |
|
|
109 |
|
1Phase 30A |
110 |
|
1Phase 10A |
111 |
|
|
112 |
|
2P TRIP 30A |
113 |
|
2P TRIP 15A |
114 |
|
AS-568A-326 |
115 |
|
AS-568A-387 |
116 |
|
AS-568A-005 |
117 |
3700-02103 |
AS-568A-251 |
118 |
3700-01716 |
AS-568A-279 |
119 |
|
AS-568A-007 |
120 |
3700-02765 |
AS-568A-280 |
121 |
|
AS-568A-109 |
122 |
|
AS-568A-127 |
123 |
|
AS-568A-256 |
124 |
|
AS-568A-256 |
125 |
|
AS-568A-282 |
126 |
|
AS-568A-263 |
127 |
|
1/4" SUS GASKET |
128 |
|
3/8" SUS GASKET |