|
Part Number |
Description |
|
0242-00955 |
KIT, MAINFRAME,CATHODE TEMP SENSOR |
|
0020-31164 |
RING,FOCUSING, ALUM,150 MM, PRSP 3 |
|
0200-30223 |
PLATE GAS DISTRIBUTION 133 HOLES |
|
0200-20219 |
COVER RING 8" |
|
0200-09474 |
RING, COVER,150MM POLY/ STAL,FLAT,RE:020 |
|
0200-00354 |
RING PURGE WXZ+ FC NOTCH |
|
0242-22481 |
KIT, CONDUCTIVE LIFT PINS, IX/IS 200MM |
|
0200-00043 |
QUARTZ COVER 6" POLY .40 |
|
0200-00036 |
RING COVER |
|
0200-00025 |
GAS RING 8 XTAL |
|
0040-04221 |
LID, LEXAN, SLIT LINER DOOR |
|
0020-09284 |
FLAG, COMB SENSOR 3/16" PITCH |
|
0150-03304 |
CABLE ASSY, AUXILLARY GROUND STRAP, EMAX |
|
0020-17113 |
COVER, MOD, CATHODE BASE, ULTIMA HDP |
|
0200-09828 |
RING FOCUS EXC, 200/201 MM, W, NOTCH, WE |
|
0040-03261 |
FTG, BARATRON, EMAX |
|
0100-20147 |
PCB ASSY MNFRAME DUAL DEGAS LIFT INTCONN |
|
0820-00102 |
DETECTOR, OPTICAL SMOKE SENSING HEAD |
|
0200-00261 |
CHAMBER INSERT 200MM TXZ CIP |
|
0010-12811 |
TxZ HEATER LIFT BKM-3/HP |
|
0020-20223 |
PLATE, GAS DISTRIBUT , 2-12150000-18 REV:G- |
|
0020-32036 |
PLATE BLOCKER 100 SX, UNIVERSAL CHAMBER |
|
0020-32318 |
GAS DISTR PLATE, 37 HOLES, OXALIC, 5-7 MIL, EGEC |
|
0040-04221 |
CHAMBER MISC (LID, LEXAN, SLIT LINER DOOR) |
|
0200-36105 |
CHAMBER INSERT 200MM TXZ CIP |
|
3870-01000 |
VALVE ASSY THROTTLE MxP + 200MM, GEAR TYP |
|
0970-01002 |
ISOL WATER COOLER RPS |
|
0010-10980 |
ASSY, TOP LID, RPS |
|
0190-70060 |
wMAGNET DRIVE ASSY( sierracin Magnedyne 1100-0051-00 Magnet Driver) |
|
0015-09091 |
PHASE ANGLE CON |
|
0190-76048 |
PWR SUP, RF 1250W 13.56MHZ 200/208VAC |
![[크기변환]KakaoTalk_20190315_150412591.jpg](file:///C:/Users/ahsan/AppData/Local/Temp/msohtmlclip1/01/clip_image002.gif)
|
wMICROWAVE TUNER,3-STUB,MANUAL,ASP |
|
0190-09227 |
PLASMA APPLICATOR, PRSP |
|
0190-09275 |
WAVEGUIDE, E-BEND,LOWER ASP |
|
0020-19003 |
INSERT , SLIT VALVE SHO |
0040-45164
0040-45206 |
ESC ASSY 200MM FLAT |
0040-45164
0040-45205 |
ESC ASSY 200MM FLAT |
0040-00876
0040-05592 |
E-Max 200mm ESC Chuck EMXP+ Dual Zone |
|
0200-00261 |
CHAMBER INSERT 200MM TXZ CIP |
|
0010-12860 |
HEATER LIFT ASSY , DXZ |
|
0190-76005 |
OMS BD |
|
0100-00793 |
VGA Video Controller PCB Card |
|
0100-20173 |
STEPPER CONTROLLER BD ASSY |
|
0190-70102 |
VGA VIDEO CONTROLLER BD |
|
DaView-500MX(MB945) |
AC220V 60Hz Power |
|
NEC PC-9801ES |
|
|
NEC PC-9801B |
|
|
0035-00074 |
COVER TOP SHIELD |
|
0020-32318 |
GAS DISTR PLATE, 37HOLES OXALIC, 5-7 MIL |
|
0021-04318 |
LINER PUMP PORT THROTTLE VALVE, EMAX 200 |
|
0200-09448 |
PLATE,QTZ,GAS DIST, LOWER, 150MM, PRSP3 |
|
0200-09219 |
COVER,RING,QUARTZ,5" METAL ETCH CHAMBER |
|
0200-09005 |
WINDOW, QUARTZ |
|
0200-00057 |
WINDOW,SMALL STD WINDOW |
|
0021-13723 |
FLANGE, BLANK, THROTTLE VALVE, EMAX, 200 |
|
0020-30652 |
COVER PEDESTAL OX/MLR/ NIT |
|
0020-09026 |
CLAMPING CYLINDER |
|
0020-03696 |
CLAMP RING, 6, DF |
|
0020-35475 |
CAPTON PADS NEW |
|
0020-32036 |
PLATE BLOCKER .100SX UNIVERSAL CHMBR,MES |
|
0200-09025 |
TUBE, QUARTZ 6MMX6.38 |
|
0010-04322 |
ASSY, SLIT VALVE DOOR, EMAX 200MM |
|
0020-09604 |
HOUSING |
|
0190-09459 |
CABLE ASSY, FIBER OPTIC 20 FT |
|
0020-09458 |
PLATE, UPPER TRAY ELEVATOR 125MM |
|
0200-36105 |
CHAMBER INSERT 200MM TXZ CIP |
|
0010-01442 |
Microwave Endpoint Detector |
|
0100-70008 |
Heat Exchanger AC Box |
|
3691-01557 |
SCR CAP SKT HD 6-32 X 5/8L TORX |
Thermo Electron Newington
MX +500W |
Power : 208V 60Hz 3PH /200V 50HZ 3/PE
RATED CURRENT : 24A
Weight : 15.3 LBS(6.9Kg) |
|
0190-22925 |
CX-1250S , COMDEL RF 13.56MHz/1.25W |
|
0190-25699 |
AE Pinnacle 10KW DC Power , AE 10KW RING-LUGS |
|
718-094756-081 |
|
|
715-011912-083 |
plate baffle upper |
|
715-28554-002 |
ESC plate |
|
715-011531-009 |
Electrode Al , Anodized |
|
|
upper Ceramic Ring |
|
131357600 |
Top Plate 8 inch |
|
716-330191-082 |
Focus Ring 8" ESC |
|
716-028240-066 |
Focus Ring 8" ESC |
|
716-330504-081 |
Focus Ring 8" |
|
853-017634-101 |
Solenoid Release |
|
660-091820-001 |
24V power Supply |
|
853-012230-002 |
Gate inner |
|
853-441119-002 |
optical end point detector |
|
853-330282-600 |
RF sensor low Match |
|
881-520470-7 |
|
|
1881-022001-18 |
System I/O 2 |
|
881-62060-3 |
tSBC-ACRTC |
|
881-520480-5 |
|
|
DSB-86/36A (9139) |
|
|
881-521480-5 |
|
|
1881-022003-1D |
OPERATOR I/F BOARD |
|
A31035C550 |
EPD Monitor Board |
|
0040-22360 |
BRACKET, ISO AMP MODULE |
|
0040-22274-A |
ADAPTER, REV 4.3/4.2 VECTRA IMP |
|
0040-20033 |
ADAPTOR TURBO/PRECLEAN INTERFACE |
|
0020-31422 |
BRKT,MTG,MAG GEN INTERFACE, ASP |
|
0020-26967 |
PC II GAS TRENCH COVER |
|
0020-25694 |
BLOCK MTG HEATER 1.18 DIA SFT MTR LIFT |
|
0020-22414 |
8" CHUCK, TC |
|
0020-22363 |
SHAFT, LIFTER, TC |
|
0020-21221 |
HOOP CD 200MM |
|
0020-20500 |
SHIELD CRYO,ROUND |
|
0020-20340 |
DOOR TRANSFER SLIT VALVE |
|
0020-13976 |
BLOCK, MOUNTING BOTTOM, SENSOR LLKB, WBL |
|
0020-13975 |
BLOCK, MOUNTING, TOP SENSOR LLKB, WBLL |
|
0020-13974 |
BLOCK, MOUNTING, BOTTOM SENSOR LLKA, WBL |
|
0020-13973 |
BLOCK, MOUNTING, TOP SENSOR LLKA, WBLL |
|
0010-09292 |
ASSY, TC AMP HOUSING GENERIC |
|
0010-13149 |
ASSY.4" WAFER SENSOR LOW PROFILE |
|
0010-20138 |
ASSY TC AMP HSNG |
|
0015-20124 |
SCR 1/4 - 20 X 1 TITANIUM VENTED FLAT HE |
|
0020-10193 |
PLUG SHANK THRTL VLVE |
|
0020-24236 |
CLIP SPRING PC II ANTENNA DOWELL |
|
0040-20292-001 |
SHORT FEED, LAMP |
|
0090-03861 |
LOADLOCK BRAKE INDEXER |
|
0150-39369 |
CABLE ASSY, TC GAUGE, POS 'C' CENTURA |
|
0190-09230 |
SW,15" HG,7/16-20 SAE/MS,OPEN DECREASING |
|
0190-30355 |
Light Pen |
|
0200-01668 |
Filer 650MM Orienter Laser |
|
0690-01843 |
CLAMP TGL FLG SST 100LBS LONG HDL W/VINY |
|
1310-01047 |
TC PROBE K-TYPE 7/16-20 TEF INSUL |
|
1400-01047 |
SNSR SMOKE DETECTOR SENSING HEAD |
|
3030-05392 |
CNTRL FLOW MON SIGNAL PROCESSOR 1 CHAN |
|
3310-01055 |
GAUGE CONVECTRON TUBE 1/4 FVCR |
|
3700-03162 |
SEAL ASSY FLANGED 1.218ID 1.853OD .250X |
|
3700-03163 |
SEAL ASSY 1.218ID 1.436OD .254X.218CS |
|
3800-00130 |
#N/A |
|
3870-01310 |
VALVE PURGE PUSHBUTTON |
|
3870-01515 |
VALVE FINE MTR 1/4 VCR VERNIER HDL |
|
3870-01669 |
VALVE CHECK 2PSID 1/4VCR 7RA MAX |
|
4020-01160 |
FLTRIN-LINE GAS 3750PSIG 1/4VCR-MM 5SLM |
|
4020-01285 |
USE 4020-01285 FLTR GAS 1000PSIG 1/4MVCR |
|
0040-01103 |
PEDESTAL COOL DOWN |
|
0020-39201 |
MOUNTING BLOCK COVER |
|
0035-00087 |
WAFER LIFT MOUNTING BLOCK |
|
0021-03724 |
CENTER FIND FLANGE |
|
0020-25225 |
CAP 8" ZX HEATER |
|
0020-29206 |
BUSHING COIL SUPPORT, VECTRA IMP |
|
0020-26900 |
HEAT SHIELD HTHU HEATER RIGHT |
|
0020-26899 |
HEAT SHIELD HTHU HEATER LEFT |
|
3300-02263 |
FTG RLF VALVE VENT APTR CRYOPUMP AL |
|
0020-41092 |
ACTUATOR SAFETY VALVE |
|
0020-21688 |
CLAMP WINDOW CCD SEE |
|
0020-22079 |
HOLDER FINGER CD/PT |
|
0020-20752 |
FINGER HOOP 200MM CD |
|
3870-01325 |
VALVE ADATOR PRESS REL CRYOPUMP/CASS LOA |
|
0040-20198 |
ELBOW 2XKF 25 ,VCR 1/4 MALE |
|
0020-20523 |
CAP, LAMP FEEDTHRU |
|
0020-22413 |
LOWER COVER, SLIT VALVE BELLOWS |
|
0020-21693 |
BLOCK LASER |
|
0020-20342 |
PIVOT TRANSFER SLIT VALVE |
|
0020-22414 |
8" CHUCK, TC |
|
0020-23441 |
BRACKET PLUMBING MOTORIZED LFT |
|
0020-20500 |
SHIELD CRYO,ROUND |
|
0021-10789 |
BRACKET, TXZ SLIT WINDOW |
|
0020-22387 |
8"HOOP WITH TC |
|
0020-23836 |
PLATE ADAPTER CLAMP G-12 |
|
0020-40723 |
ADAPTER, LHS/RHS PLATFORM |
|
0020-40044 |
CLAMP, BASE 150MM/200MM, PLATFORM |
|
0040-20165 |
BRACKET VCR CROSS |
|
3300-02155 |
FTGTBG TEE UNION FLANGE NW25KF SST304 |
|
0020-24291 |
MOUNTING PLATE PC 2 RF MATCH |
|
0040-87410 |
ADAPTER, WIDE BODY INDEXER CMF CENTURA |
|
0020-20700 |
CLAMP END AR FLEX 8" GATE VALVE |
|
0030-70046 |
MACHINING, BRKT CLAMP SOURCE |
|
0040-52152 |
BLADE, SHUTTER, 8" TA/BESC W/PIN |
|
0020-20587 |
INSERT, SLIT VALVE MACHINED |
|
0020-05605 |
ORIENT CHAMBER LIFT HOOP 8.0INCH |
|
0040-01110 |
MOUNT DOOR TRANSFER SLIT VALVE |
|
3300-02260 |
FTG TEE 2.75 CONFLAT SST 2.75 X 2.46 |
|
0021-36081 |
CLAMP,PERF PLATE TxZ |
|
0021-36164 |
RF ISOLATOR CLAMP TxZ |
|
0020-40779 |
BLOCK, CYL MT, LLC |
|
0020-29334 |
CLAMP, INSERT INSULATOR |
|
0020-24265 |
PLATE STOP WAFER LIFT PRECLEAN 2 |
|
0020-24890 |
LIMITER WAFER LIFT PC II |
0020-13607
0020-13606 |
BRACKET, TTF CLAMP HOLD, COMMON CENTURA
BRACKET, TTF BASE HOLD, COMMON CENTURA |
|
0020-22412 |
UPPER COVER, SLIT VALVE BELLOWS |
|
0020-27455 |
DISK 8" ADVANCED 101 SHUTTER |
|
0020-13998 |
PLATE, SOURCE ALIGNMENT PIN |
|
0020-23487 |
BRACKET MOUNTING 2-PHASE DRIVER |
|
0020-27123 |
PEDESTAL, PCII 8" SNNF |
|
0021-35897 |
ENCLOSURE INTLK TC AMP TXZ MCVD |
|
0020-22844 |
PEDESTAL SHIELD, 8" PRECLEAN |
|
0020-76384 |
INTLK TRIP BRACKET, PCII RESN |
|
0020-13999 |
BRKT, SOURCE ALIGNMENT PIN |
|
0020-21035 |
BRACKET SOURCE WATER LINE |
|
0021-35920 |
HOUSING,RF ADAPTER,TxZ MCVD |
|
0020-21691 |
PLATE 8" CCD VACUUM SEAL |
|
0020-34617 |
PLATE,MTG,T/C AMP |
|
0040-62802 |
BRACKET, MOUNTING, 5-PHASE DRIVER |
|
0020-22922 |
BRKT MN/FRM SMOKE SENSOR MTG |
|
0020-75980 |
COLLAR, 1.18' SHAFT, HTESC HTR ISOLATOR |
|
0020-20343 |
CYLINDER ADAPTER TRANSFER SLIT VALVE |
|
0020-21043 |
COVER, SWITCH W/ CONNECTOR |
|
0020-23442 |
COVER PLUMBING MOTORIZED LFT |
|
0020-22296 |
COVER ORIENTATION PCB |
|
0020-22295 |
BRACKET MTG WADER ORIENTATION PCB |
|
0021-76742 |
OUTRIGGER SUPPORT BAR,SMIF INTERFACE,CEN |
|
0021-76885 |
BRACKET,INTERFACE,LLB SIDE ,SMIF |
|
0021-76886 |
BRACKET,INTERFACE,LLA SIDE ,SMIF |
|
0020-22879 |
ENCLOSURE, SHUTTER |
|
0020-27103 |
LIFT HOOP 8" HEATED 101 |
|
0040-20136 |
MANIFOLD, H20 SOURCE 13" |
|
0020-23437 |
BLOCK MOUNTING HEATER MOTORIZED LIFT |
|
0020-23473 |
CLAMP HEATER MOTORIZED LIFT |
|
0020-75740 |
LOAD LOCK OUT OF WAFER SENSOR |
|
0020-20810 |
CLAMP RF CONNECTOR |
|
3030-04879 |
SNSR FLOW INSERTION SST |
|
0040-76368 |
MANIFOLD SHORT |
|
3300-04298 |
FTG TBG CONN 9/16-18MP X 11/16-16 |
|
0040-76073 |
ARM, WLDMT SOURCE WIDE BODY CHMBR |
|
0020-23286 |
COVER INSULATOR TIN 8" |
|
0020-23621 |
FRAME SOURCE G12 |
|
0010-00975 |
|
|
0100-35103 |
MAG GEN INTERFACE ASP |
|
0010-35049 |
ASSY, BOX, MAIN AC DISTRIBUTION |
|
0100-35054 |
PCB ASSY,CHMBR INTERFACE |
|
0190-70109 |
ASSY, PCB ASP CHAMBER INTERFACE |
|
0100-65054 |
|
|
0100-20004 |
wPCB ASSY, CHAMBER INTERCONNECT |
|
0100-76259 |
ASSY PCB WAFER ORIENTER CONTROLLER BD |
|
0100-20012 |
PCB ASSY, ISOLATION AMPLIFIER |
|
0100-09222 |
CHAMBER INTERFACE BOARD ASP |
|
0100-35279 |
PCB ASSY, LOAD LOCK BEEPER |
|
0660-01699 |
CONNECTRON GAUGE 8CB USED |
|
0100-02016 |
PCB ASSY, ANALOG SYNC DETECT |
|
0100-35082 |
PCB ASSY CHAMBER INTERCO A&C CENTURA MXP |
|
0100-35083 |
PCB ASSY CHAMBER INTCNCT B&D CENTURA MXP |
|
0190-70103 |
PCB ASSY ANALOG MONITOR LIGHT PEN |
|
0100-76280 |
200MM SMIF INTERLOCK BOARD |
|
0200-23479 |
|
|
0020-23350 |
SHIELD RF HEATER TOP MTRZD LEFT |
|
0020-23470 |
BLOCK MOUNTING GUIDE SHAFT MOTORIZED |
|
0040-20727 |
TUBE FLANGED HTR RF LOWER ESC/HT HTR/P |
|
0040-20726 |
SHIELD,HTHU HEATER RF TOP |
|
0021-23198 |
HOOP, LIFT OPENS 8" MCA E-CHUCK |
|
0010-09174 |
ASSY THRVL VALVE 200MM, DOWNSTR,VI ORING |
|
0010-10556 |
MONOCROMATOR MODULE ASSY-P/C ENDPNT 19" |
|
0010-37804 |
THROTTLE VALVE ASSEMBLY, TEOS, DOWNSTREA |
|
0040-31953 |
ADAPTER,GV,LOWER CHAMBER,DPS MEC |
|
0190-17853 |
300MM ROBOT DRIVER ELA-B014CFL-03 |
|
?? |
|
|
0010-21844 |
MAGNET ASSY DURASOURCE TTN ENCAPSULATED |
|
0020-22982 |
ADAPTER TIN 8" WAFER CHAMBER 16" |
|
0190-09419 |
DRIVE SINGLE PHASE, PHASETRONICS |
|
0010-13629 |
ASSY, B101 MOTORIZED LIFT |
|
0010-70271 |
ASSY 101 WAFER LIFT |
|
0040-02938 |
GAS MANIFOLD OUTPUT 200MM TXZ CIP |
|
0010-21154 |
ASSY PUMP INTERFACE BOX |
|
|
|
|
0021-36719 |
BULKHEAD,WATER,LOWER CHAMBER,MAIN,DPS |
|
0040-20133 |
COOLDOWN FLANGE |
|
0010-70334 |
CENTURA SCREEN BAFFLE ASSEMBLY |
|
0020-41227 |
FLAG, Z DIR. INDEXER |
|
0020-23203 |
CUP, RF MATCH INTERLOCK |
|
0020-23204 |
FOUNDATION,RF MATCH INTERLOCK |
|
0190-13332 |
CRYOPUMP, OB 8F FR W/RECSSD HTR LD |
|
0020-22126 |
COVER LIFT PVD |
|
0020-20667 |
MOUNT LIFTER BEARING |
|
0020-21826 |
CLAMP VIEWPORT DETECTOR |
|
0010-21529 |
6" 101 Heater Ass'y |
|
3870-01334 |
VALVE PNEU-ACT RTANG 1"OD NW25 AIR-OPEN/ |
|
0040-76073 |
ARM, WELDMENT, SOURCE, W/B |
|
0040-20257 |
ASSY LIFT HOOP 8" WIDE BODY CHAMBER |
|
0090-35731 |
ASSY, STPR MTR DRIVER, ASP+ ENHANCED LIF |
|
0020-25226 |
OBS: HOOP, HTHU 8" HEATER |
|
0020-20462 |
VIEWPORT COVER TRANSFER CHAMBER |
|
0030-70084 |
HOLDOWN RING,VIEWPORT |
|
0090-35731 |
ASSY, STPR MTR DRIVER, ASP+ ENHANCED LIF |
|
0242-00955 |
KIT, MAINFRAME,CATHODE TEMP SENSOR |
|
0020-31164 |
RING,FOCUSING, ALUM,150 MM, PRSP 3 |
|
0200-30223 |
PLATE GAS DISTRIBUTION 133 HOLES |
|
0200-20219 |
COVER RING 8" |
|
0200-09474 |
RING, COVER,150MM POLY/ STAL,FLAT,RE:020 |
|
0200-00354 |
RING PURGE WXZ+ FC NOTCH |
|
0242-22481 |
KIT, CONDUCTIVE LIFT PINS, IX/IS 200MM |
|
0200-00043 |
QUARTZ COVER 6" POLY .40 |
|
0200-00036 |
RING COVER |
|
0200-00025 |
GAS RING 8 XTAL |
|
0040-04221 |
LID, LEXAN, SLIT LINER DOOR |
|
0020-09284 |
FLAG, COMB SENSOR 3/16" PITCH |
|
0150-03304 |
CABLE ASSY, AUXILLARY GROUND STRAP, EMAX |
|
0020-17113 |
COVER, MOD, CATHODE BASE, ULTIMA HDP |
|
0200-09828 |
RING FOCUS EXC, 200/201 MM, W, NOTCH, WE |
|
0040-03261 |
FTG, BARATRON, EMAX |
|
0100-20147 |
PCB ASSY MNFRAME DUAL DEGAS LIFT INTCONN |
|
0820-00102 |
DETECTOR, OPTICAL SMOKE SENSING HEAD |
|
0200-00261 |
CHAMBER INSERT 200MM TXZ CIP |
|
0010-12811 |
TxZ HEATER LIFT BKM-3/HP |
|
0035-00074 |
COVER TOP SHIELD |
|
0020-32318 |
GAS DISTR PLATE, 37HOLES OXALIC, 5-7 MIL |
|
0021-04318 |
LINER PUMP PORT THROTTLE VALVE, EMAX 200 |
|
0200-09448 |
PLATE,QTZ,GAS DIST, LOWER, 150MM, PRSP3 |
|
0200-09219 |
COVER,RING,QUARTZ,5" METAL ETCH CHAMBER |
|
0200-09005 |
WINDOW, QUARTZ |
|
0200-00057 |
WINDOW,SMALL STD WINDOW |
|
0021-13723 |
FLANGE, BLANK, THROTTLE VALVE, EMAX, 200 |
|
0020-30652 |
COVER PEDESTAL OX/MLR/ NIT |
|
0020-09026 |
CLAMPING CYLINDER |
|
0020-03696 |
CLAMP RING, 6, DF |
|
0020-35475 |
CAPTON PADS NEW |
|
0020-32036 |
PLATE BLOCKER .100SX UNIVERSAL CHMBR,MES |
|
0200-09025 |
TUBE, QUARTZ 6MMX6.38 |
|
0010-04322 |
ASSY, SLIT VALVE DOOR, EMAX 200MM |
|
0020-09604 |
HOUSING |
|
0190-09459 |
CABLE ASSY, FIBER OPTIC 20 FT |
|
0020-09458 |
PLATE, UPPER TRAY ELEVATOR 125MM |
|
0200-36105 |
CHAMBER INSERT 200MM TXZ CIP |
|
0090-76133 |
ASSY,ELECT,SBC SYNERGY 68040 CPU WITH 16 |
