img
English
img
img
Product

Canon stepper spare parts


Order

 

Part No Description
5915PC-22t-B30 FAN
BD2-4835-130 SPACER,ADJUSTING(T=13) SUS
BD2-4835-150 SPACER,ADJUSTING(T=15) SUS
BE1-8572 HOLDER,RING 1
BE1-8573 HOLDER,RING 2
BE1-8574 HOLDER,RING 3
BE1-9616 SPACER
BF6-3046 SCH ( Hand 1 ) Robot Arm
BG0-7754  2ND CONDENSER LENS UNIT,(B)
BG0-7755 2ND CONDENSER LENS UNIT,(C)
BG0-7896 2ND CONDENSER LENS (BC TYPE)
BG3-1407 IMAGE PROCESSOR PCB ASS'Y
BG3-2090 M-POS 3 PCB
BG3-2525 IMAGE SHIFTER2
BG3-2794 IL5-C/D PCB ASS'Y
BG3-2851 MOTOR UNIT,DC 10-37.5W
BG3-3014 M-POS 5 PCB
BG3-3048 ECI-CD5 PCB ASS'Y
BG3-3118 HEAD AMP PCB ASS'Y
BG3-3336 EXP CD2 PCB ASS'Y
BG3-4356 Reticle Turn Table Reticle detection sensor
BG3-5132 LB-SUB PCB ASS'Y
BG3-5179 ACCELERATION SENSOR UNIT (B)
BG3-5218 OAS-AF SENSOR PCB ASS'Y
BG3-6644 URS-CD (EX6) PCB ASS'Y
BG3-6716 MEASUREMENT BOARD ASS'Y (X,YQ)
BG3-6730 DAMPER CD P6 PCB ASS'Y
BG4-2014 Scope CAMERA
BG4-2035 IPIF-3 PCB ASS'Y
BG4-2766 5CH OPAF ASS'Y W/IC PCB
BG4-2770 Linear Motor Power Module
BG4-2846 OAS AF SENSOR AMP PCB ASS'Y
BG4-2875 PA PCB ASS'Y W/IC
BG4-3505 SH PCB ASS'Y, W/IC
BG4-4378 EXPOSE SHUTTER UNIT
BG4-4648 XY STAGE CHECK PCB ASS'Y W/IC
BG4-4907 XY PRE-AMP(X) PCB ASS'Y W/IC
BG4-4908 XY PRE-AMP(Y) PCB ASS'Y W/IC
BG4-5039 PA CCD Unit / Ori R Type 6Inch
BG4-5039 PA CCD Unit / Ori L Type 6Inch
BG4-5039 PA CCD Unit / Ori R Type 4~6nch
BG4-5039 PA CCD Unit ( 8 Inch Ori L Type ) 
BG4-5039 PA CCD Unit ( 8 Inch Notch R Type )
BG4-5421 Piezo
BG4-5459 PZ DRV PCB
BG4-6055 Reticle Cassette Robot Arm
BG4-6456 STAGE DSP PCB ASS'Y
BG4-6457 XY STAGE PRE-AMP PCB ASS'Y
BG4-6459 OFCD-IF PCB ASS'Y
BG4-6460 PZ ANA PCB
BG4-6463 Stage Piping Box ( With PCB )
BG4-6465 MEASUREMENT PCB (X) ASS'Y
BG4-6465 MB PCB ( ZMI 1000A )
BG4-6466 MEASUREMENT PCB (Y) ASS'Y(ZMI 1000A)
BG4-6466 MEASUREMENT PCB (Y) ASS'Y(8020)
BG4-6467 MEASUREMENT PCB (THETA) ASS'Y
BG4-6467 MB PCB (THETA) ASS'Y  ( ZMI 1000A )
BG4-6572 FLAT CABLE (Y2)
BG4-6579 MV CD PCB ASS'Y
BG4-6583 HRD SENSOR PCB ASS'Y
BG4-6590 P-MOUNT CD PCB ASS'Y
BG4-6602 Linear Motor Power Module(SET)
BG4-6603 CCD OPTF CAP(2) PCB ASS'Y
BG4-6604 PULSE MOTOR UNIT,DC 10W UNDER
BG4-6619 SNS PCB ASS'Y
BG4-6626 i4 Main CPU PCB
BG4-6628 CAM UNIT(PCB ASS'Y)
BG4-6629 XY STAGE CPU PCB ASS'Y
BG4-6631 CD I/F PCB ASS'Y
BG4-6632 TV IMAGE CPU PCB ASS'Y
BG4-6633 TV Back Palnel
BG4-6690 1ST CONDENSER LENS UNIT(MAIN)
BG4-6692 2ND COND,ZOOM LENS UNIT (I4)
BG4-6697 MERCURY LAMP, 2KW
BG4-6698 Lamp Starter ( 2KW )
BG4-6704 IL1 C/D PCB ASS'Y
BG4-6705 IL2 C/D PCB ASS'Y
BG4-6724 RETICLE ROBOT CONTROLLER UNIT
BG4-6735 RETICLE ROBOT UNIT (Need Overhaul)
BG4-6737 HAND UNIT,R/C CASSETTE
BG4-6745 R/C CPU PCB ASS'Y
BG4-6746 RC/WF IF PCB
BG4-6755 SH PCB ASS'Y
BG4-6789 LD/PD PCB
BG4-6794 WF SCH/EL PCB ASS'Y
BG4-6811 PA/SH PCB
BG4-6811 WF PA/SH PCB ASS'Y
BG4-6823 WF CPU PCB
BG4-6867 CD80-CD PCB ASS'Y
BG4-6902 ASCD(L) PCB ASS'Y
BG4-6903 ASCD(R) PCB ASS'Y
BG4-6928 URS CD PCB ASS'Y
BG4-6934 OPTF CCD Cable
BG4-6935 OPTF CCD Cable
BG4-6936 OPTF CCD Cable
BG4-6937 OPTF CCD Cable
BG4-6938 OPTF CCD Cable
BG4-6973 AC/DC Power Supply ( D-Rack )
BG4-6974 E-CD PCB ASS'Y
BG4-7001 RS-232C SWITCHING PCB ASS'Y
BG4-7082 Lamp Power Supply
BG4-7089 Motor
BG4-7093 Motor
BG4-7648 1ST CONDENSER LENS UNIT
BG4-7653 IL2(W) CD PCB A'SSY
BG4-7847 CABLE ASS'Y,RCRO-2 (reticle liberary)
BG4-7874 2ND CONDENSER LENS UNIT (A)
BG4-7937 CAP2 PCB
BG4-7938 HROA CD2(W) PCB A'SSY
BG4-8182 CD80-CD2 PCB ASS'Y
BG4-8192 INTERMEDIATE LIBRARY CONTROL
BG4-8193 LIBRARY ELEVATOR CONTROL PCB
BG4-8224 M-POS PCB
BG4-8516 LED UNIT (R)
BG4-8517 LED UNIT (L)
BG4-8539 IL1-CD PCB ASS'Y
BG4-8546 IL3-CD PCB ASS'Y
BG4-8620 ACCELERATION SENSOR UNIT (V)
BG4-8621 ACCELERATION SENSOR UNIT (H)
BG4-8632 Wafer Chuck (6", ORI, Ring )
BG4-8632 Wafer Chuck (8", ORI, Pin )
BG4-8632 Wafer Chuck (8", Notch, Ring )
BG4-8632 Wafer Chuck (6", ORI, Pin ) Japan
BG4-8700 　
BG4-8705 MV-CD PCB ASS'Y
BG4-8789 　
BG4-8835 URS-CD(EX) PCB ASS'Y
BG4-8866 ILLUMINATION PRE AMP Unit
BG4-8980 XY-Stage 교환 리뿔
BG4-9153 HEAD AMP PCB ASS'Y
BG4-9154 STAGE DIST.PCB ASS'Y (X)
BG4-9159 STAGE DIST.PCB ASS'Y (B)
BG4-9175 MLE IF PCB ASS'Y
BG4-9191 STAGE PRE-AMP PCB ASS'Y (2)
BG4-9195 STAGE DIST.PCB ASS'Y (Y2X)
BG4-9218 MLE-INTERMEDIATE PCB ASS'Y
BG4-9250 IL2W CD PCB ASS'Y
BG4-9297 CURRENT AMP PCB ASS'Y (XY)
BG4-9300 CURRENT AMP PCB ASS'Y (FZ)
BG4-9332 DAMPER CD2 PCB ASS'Y
BG4-9369 COAXIAL CABLE UNIT
BG4-9745 OFCD-IF(2) PCB ASS'Y
BG5-2114 Exposure Shutter
BG5-5403 MASKING BLADE (Old type)
BG6-1212 PCB ASS'Y,SC IF AS-2
BG6-1256 PCB ASS'Y,PM DRV/AS
BG6-1291 PCB ASS'Y,DST 1-9/SA-1
BG6-4201 Cable
BG9-1084 IL MASK DRIVING PCB ASS'Y
BG9-2155 4CH. PRE AMP PCB ASS'Y
BG9-2269 LED UNIT
BG9-3346 SENSOR 1 PCB ASS'Y W/IC
BG9-3500 ADP 2 PCB
BG9-3501 IMP2 PCB
BG9-3502 ACC1 PCB
BG9-3632 LED UNIT (880NM)
BG9-3718 XY STAGE I/F PCB
BG9-3727 XY STAGE CPU PCB ASS'Y W/IC
BG9-3769 PIEZO DRIVE PCB ASS'Y  W/IC
BG9-3779 PIEZO (A) PROCESSOR PCB ASS'Y
BG9-4084 ACC-I (1) PCB ASS'Y W/IC
BG9-4152 PCB Extenstion
BG9-4658 OPTF LED BOX
BH2-0661 MOTOR, AC 15W
BH2-0802 VALVE,REGULATOR
BH2-1080 Magnetic Velve
BH2-1218 MAGNETIC VALVE
BH2-1224 MAGNETIC VALVE
BH2-9113 PA Module
BH2-9114 Reticle Library Drive PCB
BH3-0801 MICRO SWITCH
BH5-3277 POWER SUPPLY, F/LASER
BH5-3500 DC POWER SUPPLY (PPC)
BH5-6240 DISPLACEMENT GAUGE (With Sensor Cable)
BH5-6240 DISPLACEMENT GAUGE (Piezo Amp Unit )
BH5-6258 ATMOSPHERIC TRANSDUCER(기압계)
BH5-7841 PCB Extenstion
BH5-7842 PCB Extenstion
BH5-7843 PCB Extenstion
BH5-7844 PCB Extenstion
BH9-0177 SCSI EXTENDER PCB ASS'Y
BN9-2615 GLASS PLATE SET
BN9-2615-101-202 GLASS PLATE
BN9-2615-101-203 GLASS PLATE
BN9-2615-101-204 GLASS PLATE
BN9-2615-101-205 GLASS PLATE
BN9-2615-101-206 GLASS PLATE
BN9-2615-101-237 GLASS PLATE
BN9-2717 GLASS BOARD/ 방진Glass
BN9-2737-000 GLASS PLATE SET
BN9-2737-001 ND FILTER (001)
BN9-2737-002 ND FILTER (002)
BN9-2737-003 ND FILTER (003)
BN9-2737-004 ND FILTER (004)
BN9-2737-005 ND FILTER (005)
BN9-3261-009 FILTER,ND FOR ES2
BN9-3261-015 FILTER,ND FOR ES2
BN9-3261-024 FILTER,ND FOR ES2
BN9-3261-037 FILTER,ND FOR ES2
BN9-3261-057 FILTER,ND FOR ES2
BN9-3261-088 FILTER,ND FOR ES2
BN9-3473 FILTER,ND,SPF 
BN9-3887 FILTER,ND,SPF FOR I4 #705
BN9-6168 COLD MIRROR
BN9-6229-030 SUB FILTER, I-LINE
BN9-7069 GLASS PLATE
BN9-7069, BF6-2162 GLASS PLATE ( 방진 Glass )
BN9-7404 CONVEX LENS
BN9-7405 MIRROR
BN9-7406 MIRROR (1st condensor Lens Upper)
BN9-7407 TOWER MIRROR
BN9-7513 I LINE FILTER UNIT
BN9-7989 Glass for dust protection
BN9-8343 IMAGE FIBER UNIT, GLASS(WEE Fiber)
BS2-3232 HARMONIC DRIVE
BS2-4327 PULLEY / Auto Feeder Robot Rail 축 Unit
BS6-2124 HARMONIC DRIVE
BS7-2013 AIR FILTER UNIT,PETRO SORBE
WG8-5051 PHOTO-INTERRUPTER,TLP1201A
WG8-5304 PHOTO SENSOR
WG9-5007 AMP UNIT
WL1-5023 MOTOR,STEPPING
WP8-5050 XYZ Sensor and AMP Unit
XG3-8022-701 Bearing
Y60-0794 1ST CONDENSER LENS UNIT D
Y60-0838 CABLE UNIT
Y60-0840 Cable
Y60-0850 AA Shutter
Y60-0861 Bar Mirror X, Y(i4,i5)
Y60-0862 LENS UNIT,1ST CONDENSER LAMP-1
Y60-0863 LENS UNIT,1ST CONDENSER LAMP-2
Y60-0863 LENS UNIT,1ST CONDENSER LAMP-2
Y60-0869 LENS UNIT, IL (2nd Zoom 고정)
Y60-0877 AA/FRA TAKE OUT UNIT
Y60-0908 2ND COND,ZOOM LENS UNIT (IW)
Y60-0909 FLY'S EYE LENS UNIT
Y60-1010 PLANE PARALLEL PLATE UNIT/Under Cover Glass
Y60-1010 PLANE PARALLEL PLATE UNIT ( under cover )
Y60-1034 GLASS PLATE UNIT
Y60-1052 GLASS COVER UNIT/Upper Cover Glass
Y60-1053 GLASS COVER UNIT
Y60-1054 1ST CONDENSER LENS UNIT,LAMP-1
Y60-1108 Theta Z Tilt Unit
Y60-1221 2nd Condensor Lens (Japan)
Y60-1301 LENS UNIT,3RD COND,W/LENS CAP
Y60-1301 LENS UNIT,3RD COND,W/LENS CAP
Y60-1478 WF Robot ( Hand 1 )
Y60-1478 SCH Robot ( Hand 1 )
Y60-1479 Reticle Robot
Y60-1480 Reticle Cassette Robot 
Y60-1762 RETICLE REFERENCE MARK UNIT (L,R)
Y60-2012 PA Hand Arm
Y60-4168 DC MOTOR UNIT, 10W UNDER
Y60-4715 TRANSFORMER SENSOR UNIT
Y75-0184 　
Y75-1020 FUSE
Y75-1125 MAGNETIC CONTACTOR(RELAY)
Y75-1126 MAGNETIC CONTACTOR (RELAY)
Y75-2025 SOLID STATE RELAY
Y75-2026 SOLID STATE RELAY
Y75-4000 TEMPERATURE SENSOR, (STG,LENS)
Y75-4001 TEMPERATURE SENSOR CABLE
Y75-4088 TRANSFORMER, 200VA
Y75-4122 Temperature Controller
Y75-6026 Power Module 
Y75-6026 Power Module 
Y75-6036 PDU -3EA
Y75-6036 PDU -3EA
Y75-6333 CYLINDER,AL,FUJIKURA GOMU
Y75-6334 PISTON,AL,FUJIKURA GOMU
Y75-6749 DISPLACEMENT SENSOR ASS'Y - Piezo
Y78-0039 　
Y78-0069 　
Y78-0088 Reticle Cassette  Robot Arm
Y78-0134 UL31 AA Type
Y78-0135 　
Y78-0135 　
Y78-0136 2nd Zoom Lens Fix
Y78-0136 2nd Zoom Lens Fix (Japan)
Y78-0175 　
Y78-0201  
Y78-0202  
Y78-0205 ND Filter
Y78-0206  
Y78-0207  
Y78-0209 　
Y78-0210 　
Y78-2006 F23 Cable
Y78-2040 　
Y78-2047 Cable
Y78-2130 　
Y78-2133 　
Y78-2140 　
Y78-2141 　
Y78-2142 　
Y78-2293 Motor
Y78-2322 Special Filter
Y78-2454 NA MOTER
Y78-2456 Cable
Y78-2456 　
Y78-2542 　
Y78-2543 Scope Fiber Set(PDA?)
Y78-3052 　
Y78-3981 Stage Flexible cable
　 X-Terminal panel
　 MAGNETIC VALVE ( Big )
　 MAGNETIC VALVE ( Small )
　 i4 Z Ball Screw
　 SCH Robot X driving Belt
　 i2 Send Hand Robot Finger Arm
　 데구치 Glass
　 Wafer Feeder In-Line Unit
　 2nd Zoom Lens Fix
　 PPC Unit
　 ikegami CRT Monitor
　 R/C CPU PCB
　 FRA / TTL AA  / BC Scope / Zygo Optic Fiber
　 TTL AA Optic Fiber Reference-2EA, Measure-2EA
　 Turn Table Unit (XYZ Sensor Target)
　 CCD OPTF Unit-iW
　 AC/DC Power Supply Unit
　 C Scope / No Camera
　 B Scope / Camera exist
　 Collimator Lens
　 iW Input Lens
　 OA Scope ( Camera included )
　 B/C Scope Mirror ( Reflector )
　 Laser Interferometer Unit
　 Laser Interferometer Pick Up Unit
　 Bar Mirror X, Y(i2)
　 Chuck Maint Unit
　 Collimator Lens
　 Piping Unit Sol Valve 
　 Piping Unit Magnetic Valve 
　 FRA switching Unit
　 WF Magnetic Velve
　 AA / FRA Pick Up Unit
　 AA / FRA ND Filter
　 UPS electric Cable
　 MEASUREMENT Cable
　 UPS
　 HEAD AMP PCB ASS'Y
　  Unifomity Detector
　 FLSS Unit
　 MO Driver Unit
　 UPS Bypass Cable
　 ND Filter SET
　 D-RACK FAN
　 i4 reference Mark
　 i5 reference Mark
　 iW reference Mark
　 2ND CONDENSER LENS Driving
　 2ND CONDENSER LENS Fix
　 key Board
　 Servo Mount Air 배관 Unit
　 Flexible Cable
　 Stage Linear Bearing
　 iW SPF Filter
　 Sensor Cable
　 X-Terminal BNC Cable
　 PA Servo Module
　 PA Wafer detect sensor AMP
　 i4 Reference Light Pick Up Unit
　 i5 Pin Theta AMP
　 i4 Mount Piping Unit CH3
　 i4 Mount Piping Unit CH1
　 EX6 Barometer
　 i5 SRC Cable AMP
　 i4 Stage Air Pad
　 i5 Berofram regurator
　 Reticle Cassette bar Code Reader
　 Mouse
　 SRC, Pin Theta Cable Sersor
　 Piezo Cable
　 UC Detecor
　 iW UC Detecor
　 i2 Temp Sensor Cable
　 PA Chuck
　 In-Line Wafer detect Sensor
　 3rd Cover Glass
　 i-Line Filter
 
Semiconductor
Inventory List

   Canon Stepper
---------------------------
   AMAT
---------------------------
   TEL Track
---------------------------
   DNS Track
---------------------------