No |
P/N |
Description |
Remark |
1 |
GLL-130088 |
UNIVERSAL CONTROLLER |
|
2 |
23021-653 |
TEST ADAPTER CARD |
|
3 |
1140-01312 |
SMIF DC POWER SUPPLY BD |
|
4 |
0730-01025 |
Seris 344 ion gauge Controller |
|
5 |
0660-01619 |
CONTROL PHASE ANGLE 120VAC |
|
6 |
0660-01548 |
Ion Gauge Module PCB |
|
7 |
0190-70103 |
MONITOR LIGHT PEN INTERCONNECT BD |
|
8 |
0190-36715 |
VDS2 COM GP IO DIST BD |
|
9 |
0190-36251 |
VDS2 MATRIX INTERLOCK MCE |
|
10 |
0100-76280 |
200MM SMIF INTERLOCK BOARD |
|
11 |
0100-76184 |
CH# PNEUMATIC INTERCONNECT BD |
|
12 |
0100-76065 |
MAIN FRAME PNEUMATIC BD |
|
13 |
0100-76059 |
M/F EXPANSION BD |
|
14 |
0100-76038 |
WAFER MAP LED BD |
|
15 |
0100-76018 |
PNEUMATIC 4WAY INT'R BD |
|
16 |
0100-75071 |
GAS PANEL DIST BD |
|
17 |
0100-70015 |
GATE VALVE INT BD |
|
18 |
0100-38116 |
WXZ HIGH PRESS INT BD |
|
19 |
0100-35250 |
CH# INTERFACE BD |
|
20 |
0100-35217 |
TXZ INTERLOCK BD |
|
21 |
0100-35192 |
DPS MAINTENANCE CONTROL BD |
P/N 1400-01117 |
22 |
0100-35160 |
TC AMP INTERLOCK BD |
|
23 |
0100-35126 |
INCOMPATIBLE GAS LOCKOUT BD |
|
24 |
0100-35117 |
CH# B INTERCONNECT BD |
|
25 |
0100-35116 |
CH# A INTERCONNECT BD |
|
26 |
0100-35116 |
CH# INTERCONNECT BD_표준화 |
|
27 |
0100-35103 |
M/W GEN INTERFACE BD_CENTURA |
|
28 |
0100-35082 |
MXP CH# INTERCONNECT BD |
|
29 |
0100-35066 |
CH# PNEUMATIC INTERCONNECT BD |
|
30 |
0100-35060 |
CH# POWER DISTRIBUTION BD |
|
31 |
0100-35034 |
STEP DRIVER POWER DIST BD |
|
32 |
0100-20371 |
IMP H20 WATER BOX INTERLOCK STATUS BD |
|
33 |
0100-20318 |
TC ISO AMP BD |
|
34 |
0100-20313 |
IMP CH# INTERCONNECT BD |
|
35 |
0100-20304 |
MUTUAL INTERLOCK BD |
|
36 |
0100-20266 |
RF INTERLOCK BD |
|
37 |
0100-20244 |
STEPPER DISTRIBUTION BD |
|
38 |
0100-20243 |
VAC PUMP & RGB INTERLOCK BD |
|
39 |
0100-20241 |
STEPPER DRIVER INTERFACE BD |
|
40 |
0100-20228 |
ENCODER INT'R BD |
|
41 |
0100-20216 |
STEPPER DRIVER INTERFACE BD |
|
42 |
0100-20207 |
DRT DRV ROBOT INTERFACE BD |
|
43 |
0100-20206 |
REMOTE GAS BOX INTERCONNECT BD |
|
44 |
0100-20180 |
PVD DRIVER BD |
|
45 |
0100-20179 |
DUAL DEGAS DRV BD |
|
46 |
0100-20152 |
SYSTEM EXPANSION BD |
|
47 |
0100-20148 |
HEATER LIFT STEP DRV INT'R BD |
|
48 |
0100-20143 |
LOADLOCK WAFER SENSOR BD |
|
49 |
0100-20139 |
DC BIAS SHORT MONITOR BD |
|
50 |
0100-20098 |
DUAL DEGAS DRV BD |
|
51 |
0100-20086 |
WAFER MAP LED BD |
|
52 |
0100-20084 |
MFC INERCONNECT BD |
|
53 |
0100-20078 |
LASER DRIVER BD |
|
54 |
0100-20073 |
WAFER DETECTOR BD |
|
55 |
0100-20071 |
15V MONITOR BD |
|
56 |
0100-20068 |
CCD BD |
|
57 |
0100-20063 |
TC GAUGE BD |
|
58 |
0100-20062 |
LF TC FILER BD |
|
59 |
0100-20060 |
PVD DRIVER BD |
|
60 |
0100-20059 |
PUMP FRAME DIST BD |
|
61 |
0100-20055 |
BLOWOUT VALVE INTERCONNECT BD |
|
62 |
0100-20052 |
SERIAL/VIDEO INTERCONNECT BD |
|
63 |
0100-20051 |
TURBO INTERCONNECT BD |
|
64 |
0100-20042 |
PNEUMATIC SLIT VALVE INT'R BD |
|
65 |
0100-20040 |
REMOTE SUPPLY DIST BD |
|
66 |
0100-20038 |
RELAY CONTROL BD |
|
67 |
0100-20033 |
VME POWER STATUS BD |
|
68 |
0100-20031 |
24V MONITOR BD |
|
69 |
0100-20024 |
ANALOG STEPPER DIST BD |
|
70 |
0100-20016 |
PNEUMATIC 3WAY INT'R BD |
|
71 |
0100-20015 |
CONVECTRON GAUGE INT'R BD |
|
72 |
0100-20012 |
ISOLATION AMPLIFIER BD |
|
73 |
0100-20011 |
CHAMBER A/B INTERCONNECT BD |
|
74 |
0100-20005 |
LOADER INTERCONNECT BD |
|
75 |
0100-20004 |
CH# INTERCONNECT BD |
|
76 |
0100-20000 |
64CH AI MUX BD |
|
77 |
0100-18062 |
CH# INTERCONNECT BD ULTIMA |
|
78 |
0100-18051 |
TC FILTER BD |
|
79 |
0100-18034 |
CVD CH# PNEUMATIC INTERCONNECT BD |
|
80 |
0100-16009 |
SMIF-AYST WIDE BODY WTESTING BD |
|
81 |
0100-16007 |
TC AMP INTERLOCK BD |
|
82 |
0100-16004 |
FINAL SIGNAL INTERFACE BD |
|
83 |
0100-09382 |
CH# INTERCONNECT ASP B-D BD |
|
84 |
0100-09381 |
CH# INTERCONNECT ASP A-C BD |
|
85 |
0100-09380 |
WXZ HTR RETRACT BD |
|
86 |
0100-09279 |
TC AMP BD |
|
87 |
0100-09255 |
ASP TC INTERFACE BD |
|
88 |
0100-09226 |
MCVD ENDPOINT BD |
|
89 |
0100-09223 |
MAG GEN INTERFACE BD |
|
90 |
0100-09222 |
ASP INTERFACE BD |
|
91 |
0100-09213 |
ASP DISPLAY BD |
|
92 |
0100-09205 |
VDS(2) INTERCONNECT BD |
|
93 |
0100-09205 |
WV INTERCONNECT BD |
|
94 |
0100-09204 |
VDS(2) CONTROL BD |
|
95 |
0100-09099 |
CHAMBER INTERCONNECT BD |
|
96 |
0100-09086 |
LIFT CONTROL(STEPPER POWER DRIVER) BD |
|
97 |
0100-09042 |
AME PHOTO SENSOR |
|
98 |
0100-09033 |
TC AMPLIFIER BD |
|
99 |
0100-09033 |
TC AMPLIFIER BD |
|
100 |
0100-09032 |
LF TC FILER BD |
|
101 |
0100-02722 |
SMIF TRACK DRIVER BD |
|
102 |
0100-01859 |
GAS PANEL INTERLOCK DETECT BD |
|
103 |
0100-01792 |
5Ph STEPPER DRIVER INTERFACE BD |
|
104 |
0100-01130 |
CCD BD |
|
105 |
0100-01098 |
LD DRIVER BD |
|
106 |
0100-00639 |
200MM SMIF INTERLOCK BD |
|
107 |
0100-00542 |
INTERCONNECT E-DTCU BD |
|
108 |
0100-00533 |
MCA+ ELEC/DC RF ISO BD |
|
109 |
0100-00413 |
LINE FILTER BOT POWER BD |
|
110 |
0100-00304 |
WXZ MICROWAVE ENDPOINT BD |
|
111 |
0100-00262 |
FREQ MATCH MODULE |
|
112 |
0100-00246 |
CH# INTERCONNECT BD CEN_II |
|
113 |
0100-00245 |
CTRL CH# INTERCONNECT CEN_II |
|
114 |
0100-00222 |
SYSTEM POWER DIST BD |
|
115 |
0100-00215 |
AC DISTRIBUTION BD |
|